00191759-01 - 第239页

 W , , W   9 ROED SURMHWRV \ ;<  3RNXG] YROtWHWXW RYROEXY PHQX 7 HVW] QDþN\SURY HGHSR þtWDþVWDQLFHQiVOHGXMtFtDNFH  ± =PL]t  P HQX 7 HVW ]QDþN\  D REUD] RYND VH S HSQH QD Y …

100%1 / 412

W ,,W
3RWRP
± MHQDYLGHRREUD]X]Qi]RUQ
QSU E KWHVWX
± 9KODYLþFHMH]REUD]HQD
iGNDVH]REUD]HQtPþtVOD]QDþN\DIDNWRUXNYDOLW\
±9
iGFHSDW\MVRX]REUD]HQ\RYOiGDFtSROtþNDDVHNYHQFHS tND] DSU E KWHVWRYiQtMH
VSXãW
QWHQSDNXUþtIDNWRUNYDOLW\]QDþN\
Å 6WODþHQtPNOiYHV\5(7851HQWHUP åHWHWHVWRSDNRYDW
Å âLSNDPLQDNOiYHVQLFLO]HP QLWSRORKXSRUWiOX=DGiQtPþtVHO  ]YROtWHGpONXNURNX
.DPHUDGHVN\]DMHGHGRURK
KOHGDFtKRSROHDUHDOL]XMHWDNMHGHQP tFtS tND]3URNDå
UHDOL]RYDP
tFtS tND]GRVWDQHNRQWURODVWURMHNYDOLWX]QDþN\RGY\KRGQRFRYDFtMHGQRWN\
]REUD]HQt0961HMKRUãtKRGQRWDZRUVWFDVHWHVWXMH]REUD]HQDQDPRQLWRUXY
iGFHKODY\
ÒGDMRNYDOLW
P åHEêWYUR]VDKXRG ãSDWQiGR YHOPLGREUiWDSUR]QDþN\D
LQNRXVWRYpERG\EDQHP
OEêWPHQãtQHå-LQDNGRSRUXþXMHPHY\EUDWMLQRX]QDþNX

W ,,W
 9ROEDSURMHWRV\;<
3RNXG]YROtWHWXWRYROEXYPHQX7HVW]QDþN\SURYHGHSRþtWDþVWDQLFHQiVOHGXMtFtDNFH
± =PL]tPHQX7HVW]QDþN\DREUD]RYNDVHS
HSQHQDYLGHRREUD]S LWRPMH]REUD]HQDDNWXiOQt
SRORKDNDPHU\DPRåQRVWLYROHE
±3
LQHEH]SHþtQiUD]XMH]DEORNRYiQR t]HQtRV
Å 3RYROE GpON\NURNXNWHUiMHPRåQiSRPRFtþtVHODåP åHWHSRK\ERYDWNDPHURXSRUWiOX
SRPRFtãLSHNQDNOiYHVQLFL
32=1È0.$
-DNRVWDQGDUWQtXþtFtVHSRUWiOMHYåG\SRXåLWSRUWiO SRUWiO\ DPRKRXEêWSRPRFt
0RåQRVW9êE USRUWiOXY\EUiQ\YL]RGVWDYHFVWUDQD
Å 3RPRFtNOiYHV\(6&P åHWHWXWRIXQNFLRSXVWLW0HQX7HVW]QDþN\MHRS W]REUD]HQR
: x-Achse +
: x-Achse -
: y-Achse +
: y-Achse -
1..6: x/y-Schritt.
x-Pos. [µm]= .......... y-Pos. [µm]= .........
x/y-Achsen verfahren
x/y - Schrittw. =
;<RV\SURMHW

W ,,W
 9ROED'HVNDQDSiV]SUDFRYiQt
.OLNQ WHQDWODþtWNR'HVNDQDSiV]SUDFRYiQtEXGRXSURYHGHQ\QiVOHGXMtFtDNFH
 'HVNDVHQDFKi]tQDYVWXSQtPSiVX
± 7UDQVSRUWQtSiVVHSRK\EXMHDWUDQVSRUWXMHGHVNXQDGRUD]
± 'HVNDMHXSQXWD
 1DYVWXSQtPSiVXQHQtåiGQiGHVND
± 2EGUåtWHKOiãHQt1DYVWXSQtPSDVXQHQtGHVND
± 9ORåWHGHVNX
±.OLNQ
WHQDWODþtWNR'HVNDQDSiV]SUDFRYiQt
± 7UDQVSRUWQtSiVVHSRK\EXMHDWUDQVSRUWXMHGHVNXQDGRUD]
± 'HVNDMHXSQXWD
32=1È0.$
-HVWOLåHMHGHVNDMLåQDSiVX]SUDFRYiQtMHWDWRIXQNFH]DEORNRYiQD'RVWDQHWHKOiãHQtåH
VHGHVNDMLåQDFKi]tYSiVX]SUDFRYiQt
32=1È0.$
3
LLQVWDORYDQpPGYRMLWpPWUDQVSRUWXP åHWHY\EUDWYHYêE URYpPER[X9êE UWUDQVSRUWX
SRPRFtWODþtWHNWUDQVSRUWQtSiVQHER
 9ROED'HVNDQDYêVWXSQtSiV
7DWRIXQNFHMHSURYHGHQDSRX]HWHKG\SRNXGMHGHVNDYSiVX]SUDFRYiQt
32=1È0.$
'HVNDEXGHS LRSXãW QtPHQXDXWRPDWLFN\S HSUDYHQDGRVWXSQtKRSiVX
32=1È0.$
3
LLQVWDORYDQpPGYRMLWpPWUDQVSRUWXP åHWHY\EUDWYHYêE URYpPER[X9êE UWUDQVSRUWX
SRPRFtWODþtWHNWUDQVSRUWQtSiVQHER