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D54SEC−00−010−C0

This service information is designed for experienced repair technicians only and

not designed for use by the general public. It does not contain warnings or cau-

tions to advise non−technical individuals of potential dangers in attempting to

service a product. Products powered by electricity should be serviced or repaired

only by experienced professional technicians. Any attempt to service or repair the

product or products dealt with in this manual by anyone else could result in seri-

ous injury or death.

WARNING

SERVICE MANUAL

SPF

D54SEC−02−020−C0

Sentence No.

Table of Contents

1.USE OF THIS MANUAL

1.1 Use of This Manual 1.1−1..........................................

1.1.1 Concerning Secrecy 1.1−1..................................................

1.1.2 Use of This Manual 1.1−1...................................................

1.1.3 Sentence Numbers 1.1−1...................................................

1.1.4 Handling of Revisions and Additions to This Manual 1.1−2.......................

1.1.5 Conventions Used 1.1−3....................................................

2.INSTALLATION

2.1 Installation Procedure 2.1−1........................................

2.1.1 Installation Position 2.1−1...................................................

2.1.2 Leveling Machine 2.1−2.....................................................

2.1.3 Accessories, Power Supply, Air Attachments 2.1−3.............................

2.1.4 Safety Check for Factory Power Connections 2.1−4............................

2.1.5 Safety Operation Check 2.1−5...............................................

2.1.6 Precision, Performance Operation Check / Manual Operation 2.1−7...............

2.1.7 Precision and Performance Check in Semi Auto Operation 2.1−8.................

2.1.8 Precision, Performance Check in Auto Operation 2.1−9.........................

2.1.9 Record Machine Information 2.1−9...........................................

3.PREPARED MATERIALS

3.1 List of Special Jigs and Tools (for Service Engineer) 3.1−1..............

3.2 List of Retail Jigs and Tools 3.2−1...................................

4.MAINTENANCE GUIDE (MECHANICAL)

4.1 Adjustment Check List 4.1−1.......................................

4.2 Lower Section Unit : Others 4.2−1...................................

4.2.1 SY Axis (Stage Y Axis) Motor Replacement 4.2−1..............................

4.2.2 ST Axis (Stage Up/Down Axis) Motor Replacement 4.2−2.......................

4.2.3 ST Axis (Stage Up/Down Axis) Origin Adjustment 4.2−4.........................

4.2.4 SY Axis (Stage Y Axis) Origin Adjustment 4.2−6................................

4.2.5 SST Axis (Support Plate Up/Down Axis) Motor Replacement 4.2−8...............

4.2.6 SST Axis (Support Plate Up/Down Axis) Height Adjustment 4.2−9................

4.2.7 Support Plate Coplanarity Adjustment 4.2−11...................................