SPF维修.pdf - 第62页
4.2 Lower Section Unit : Others SERVICE MANUAL SPF 4.2−9 D54SEC−W4−600−B0 4.2.6 S S T A x i s (Support Plate Up/Down Axis) Height Adjustment Unit No. S S T A x i s (Support Plate Up/Down Axis) Height Adjustment Maintenan…
SPF
4.2 Lower Section Unit : Others
SERVICE MANUAL
4.2−8
D54SEC−W4−600−B0
4.2.5 SST Axis (Support Plate Up/Down Axis) Motor
Replacement
Unit No. 1080804300
SST Axis (Support Plate
Up/Down Axis) Motor
Replacement
4.2.6 SST Axis (Support Plate
Up/Down Axis) Height
Adjustment
SST axis motor replacement
1. Turn the power [ON] and return to origin.
2. Turn the power [OFF] and insert the stoppers
between the sub stage table and the support plate
frame.
=CHECK=
Support plate frame lowers if the coupling bolt
on the motor side is loosened.
3. Remove the rear lower side cover.
=CHECK=
Make sure that the coupling can be seen
from the rear left side.
4. Disconnect the motor connectors.
5. Loosen the coupling bolt on the motor side.
6. Remove the motor bolt and the motor.
7. Replace the motor.
8. Tighten the the coupling bolt on the motor side.
9. Tighten the motor bolt.
10. Connect the motor connectors.
Motor bolt
Motor
Coupling
Sub stage table
Support
plate
frame
ST axis motor
SST axis motor
Stoppers
4.2 Lower Section Unit : Others
SERVICE MANUAL
SPF
4.2−9
D54SEC−W4−600−B0
4.2.6 SST Axis (Support Plate Up/Down Axis) Height
Adjustment
Unit No.
SST Axis (Support Plate
Up/Down Axis) Height
Adjustment
Maintenance Manual /
MAINTENANCE GUIDE / Fixed
Rail Guide Parallelism
Adjustment
Maintenance Manual /
MAINTENANCE GUIDE / Fixed
and Movable Rail Guide
Coplanarity Adjustment
=Preparation=
1. Dial gauge
2. Magnet stand
3. Support height adjustment jig (55.9mm)
SST axis height adjustment
1. Turn the power [ON] and return to origin.
2. Set the rail width to 250mm.
3. Move the SY axis (stage Y axis) to
150mm.
4. Set the support height adjustment jig on
the sub stage table.
5. Attach the magnet stand to the CX axis
frame.
6. Touch the dial gauge to the support height
adjustment jig.
7. Zero the dial gauge.
8. Move the CY axis in NC AXIS JOG
CHECK and touch the dial gauge to the
upper surface point A on the fixed rail
guide.
9. Check the gap of the the upper surface
point A on the fixed rail guide and the
support height adjustment jig plate frame.
10. In the same way, check the gap of b−B,
c−C and d−D.
=Specification=
Gap : Within ± 0.05mm
11. If not within the specification, remove the
rear cover.
12. Move the sub stage table to rear.
13. Insert the stoppers between the sub stage
table and the support plate frame.
=CHECK=
Sub stage table lowers if the coupling
bolt on the motor side is loosened.
14. Loosen the coupling bolt on the motor side.
Sub stage table
Support height adjustment jig
Dial gauge
Support plate frame
Reference 0
ST axis motor
SST axis motor
Stoppers
Ref. 0
ba
c
B
D
d
Ref. 0
Ref. 0
Ref. 0
C
A
4mm
2mm
60mm
480mm
15mm
15mm
FIxed rail guide
55.9mm
SPF
4.2 Lower Section Unit : Others
SERVICE MANUAL
4.2−10
D54SEC−W4−600−B0
15. Rotate the ball screw to adjust.
=HINT=
Adjust the gap with touching the dial gauge to
the support height adjustment jig before
loosening the coupling bolt.
16. Tighten the coupling bolt on the motor side.
17. Check the gap again.
18. Attach the rear cover.
19. Check the (±) limit sensors.
=Specification=
(+) limit : 25.5±0.5mm
(−) limit : −29±0.5mm
Mechanical stopper
(+) limit
Mechanical stopper
(−) limit
Origin (5mm under PCB )
27.5
25.5
0
−29
−31
Stroke related diagram