Micron Maintenance Manual - 第72页

2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS 2.16 Rail System 72 MAINTENANCE MANUAL MICRON 11/2017 2.16 RAIL SYSTEM 1 2 3 4 Fig.16: View on Left Side Rail Assembly Item Description Item Description 1 Horizontal Line…

100%1 / 92
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.15 ProFlow
MAINTENANCE MANUAL MICRON 11/2017 71
2.15 PROFLOW
3
1
2
Fig.15: View on ProFlow Mount
Item Description Item Description
1 Leadscrew 3 Drive Belt
2 Linear Bearing Guide
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.16 Rail System
72 MAINTENANCE MANUAL MICRON 11/2017
2.16 RAIL SYSTEM
1
2
3
4
Fig.16: View on Left Side Rail Assembly
Item Description Item Description
1 Horizontal Linear Bearing Guide (in 2
positions)
3 Clatter Bar (in 2 positions)
2 Ballscrew (in 2 positions) 4 Vertical Linear Bearing Guide (in 4 po-
sitions)
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.17 Under Stencil Cleaner
MAINTENANCE MANUAL MICRON 11/2017 73
2.17 UNDER STENCIL CLEANER
1
2
3
4
Fig.17: View on Left Side of USC
Item Description Item Description
1 USC Magnet (in 2 positions) 3 USC Linear Bearing Block (in 2 positions)
2 USC Home Sensor 4 Camera Y Linear Bearing Guide Rail (in 2 po-
sitions)