Micron Maintenance Manual - 第73页
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS 2.17 Under Stencil Cleaner MAINTENANCE MANUAL MICRON 11/2017 73 2.17 UNDER STENCIL CLEANER 1 2 3 4 Fig.17: View on Left Side of USC Item Description Item Description 1 US…
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.16 Rail System
72 MAINTENANCE MANUAL MICRON 11/2017
2.16 RAIL SYSTEM
1
2
3
4
Fig.16: View on Left Side Rail Assembly
Item Description Item Description
1 Horizontal Linear Bearing Guide (in 2
positions)
3 Clatter Bar (in 2 positions)
2 Ballscrew (in 2 positions) 4 Vertical Linear Bearing Guide (in 4 po-
sitions)
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.17 Under Stencil Cleaner
MAINTENANCE MANUAL MICRON 11/2017 73
2.17 UNDER STENCIL CLEANER
1
2
3
4
Fig.17: View on Left Side of USC
Item Description Item Description
1 USC Magnet (in 2 positions) 3 USC Linear Bearing Block (in 2 positions)
2 USC Home Sensor 4 Camera Y Linear Bearing Guide Rail (in 2 po-
sitions)
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.18 External Solvent Tank
74 MAINTENANCE MANUAL MICRON 11/2017
2.18 EXTERNAL SOLVENT TANK
1
2
3
Fig.18: View of External Solvent Tank
Item Description Item Description
1 Solvent Container 3 External Solvent Tank
2 Solvent Container Housing