Micron Maintenance Manual - 第74页
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS 2.18 External Solvent Tank 74 MAINTENANCE MANUAL MICRON 11/2017 2.18 EXTERNAL SOLVENT TANK 1 2 3 Fig.18: View of External Solvent Tank Item Description Item Description 1…
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.17 Under Stencil Cleaner
MAINTENANCE MANUAL MICRON 11/2017 73
2.17 UNDER STENCIL CLEANER
1
2
3
4
Fig.17: View on Left Side of USC
Item Description Item Description
1 USC Magnet (in 2 positions) 3 USC Linear Bearing Block (in 2 positions)
2 USC Home Sensor 4 Camera Y Linear Bearing Guide Rail (in 2 po-
sitions)
2 CLEANING, LUBRICATION AND MAINTENANCE DIAGRAMS
2.18 External Solvent Tank
74 MAINTENANCE MANUAL MICRON 11/2017
2.18 EXTERNAL SOLVENT TANK
1
2
3
Fig.18: View of External Solvent Tank
Item Description Item Description
1 Solvent Container 3 External Solvent Tank
2 Solvent Container Housing
3 VACUUM FILTRATION UNITS
3.1 FILTER REPLACEMENT
MAINTENANCE MANUAL MICRON 11/2017 75
3
VACUUM FILTRATION UNITS
3.1 FILTER REPLACEMENT
It is recommended that the filters in the vacuum filtration units are changed on a yearly basis with
the appropriate part number listed in the table below
NOTE
Not replacing the filters or using non-standard parts may have a serious impact on the effective
cleaning of the stencil.
3.1.1 Vacuum Filters
Description Part Number
VF35i Carbon Filter 173357
VF35i Standard Pre-Filter 173358
VF35i HEPA Pre-Filter (cleanroom use) 173359
VF35i Filter Kit (1x 173357 and 1x 173358) 173373
VF35i Filter Kit (1x 173357 and 1x 173359) 173374
.
VF30 Carbon Filter 225093
.
VF25 Carbon Filter 163552
VF25 Standard Pre-Filter 163551
VF25 Filter Kit (1x 163552 and 1x 163551) 173102
.
VF10 HDPE Foam Filter (pack of 3) 187871