SM321 Technical Reference_Ver3 - 第36页

Page SAMSUNG TECHWIN 36 SM321 H ea d As s’y _4 Spi nd le (4 /4) 1 7 1 0 1 1 3 8 1 1 - B 1 1 - A 1 2 1 3 ` 1 5 1 4 1 5 1 4 1 6 1 8 1 9

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SAMSUNG TECHWIN
35
SM321
Head Ass’y_4Spindle (3/4)
36
31
3
22
31
23
24
25
Page
SAMSUNG TECHWIN
36
SM321
Head Ass’y_4Spindle (4/4)
17
10
11
38
11- B
11- A
12
13`
15
14
15
14
16
18
19
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SAMSUNG TECHWIN
37
SM321
Head Ass’y_4Spindle
P art L is t
NO. LEVEL PART NO. PART NAME Q'TY TYPE Old No. Stock
1 J90551071A HEAD_ASSY_4SPINDLE J90551071A
1
J90551071A
2 ..2 J90831189AR12_STEP_MOTOR_CABLE_ASSY[SM21-MD038]
1
SM21-MD038
○
No.4 at 102 page
3 ..2 J9083179A SIDE ILL U/D SENSOR CABLE ASSY[SM21-HD00
1
SM21-HD006
○
No.6 at 92 page
4 ..2 J90831009A R34_MOTOR_CABLE_ASSY
1
SM21-MD039
○
5 ..2 J90800829B SWING MOTOR CABLE ASSY
1
SM_MD032
○
6 ..2 J9080823A Z1 MOTOR CABLE ASSY[SM_MD026]
1
SM_MD026
○
7 ..2 J9080824A Z2 MOTOR CABLE ASSY[SM_MD027]
1
SM_MD027
○
8 ..2 J9080825A TIMING BELT[384-1.5GT-9]
1
SM_MD028
○
9 ..2 J9080826A Z4 MOTOR CABLE ASSY[SM_MD029]
1
SM_MD029
○
○
10 ..2 J90601021A SM321E_VACUUM_SENSOR_BOARD VER 1.1
1
VER 1.1
11 ..2 J90551068B AIR_MODULE
1
J90551068B
11-A ...3 J6711261A ONE TOUCH FITTING[FSC04-M5C]
4
FSC04-M5C
○
11-B ...3 J6711260A ONE TOUCH FITTING[FSE04-M5C]
2
FSE04-M5C
○
11-C ...3 J6705009A SILENCER[AS-5]
1
AS-5
○
12 ...3 J6702048A SOLENOID VALVE[VA01PEP34-1U-F]
4
SM21-HI001
○
13 ...3 J6711262A MINI FITTING[BC-03-M5]
4
BC-03-M5
○
14 ...3 J6703039A SPEED CONTROLLER[SPR-Z-M3N]
2
SPR-Z-M3N
○
15 ...3 J6711263A MINI FITTING[BE-04-M3]
2
BE-04-M3
○
16 ...3 J67081010A ATMOSPHERIC_FILTER LF-M3-Z07-021
4
LF-M3-Z07-021
○
17 ...3 J9058090A FILTER ASSY[J9058090A]
4
J9058090A
○
18 ..2 J7458002A FILTER ELEMENT[LF-M5-60-Z-ELEMENT]
6
LF-M5-60-Z-ELEMENT
○
19 ...3 J6702049A SOLENOID VALVE[RCS242-M3-D24NP]
1
RCS242-M3-D24NP
○
20 ..2 J9055357A PULLEY ASSY (Z-AXIS 2)
4
J9055357A
○
21 ..2 J9055209A COMMON NOZZLE HOLDER ASSY[J9055209A]
4
J9055209A
○
22 ..2 J90551013A MIRROR_ASSY
1
J90551013A
23 ...3 J90551011A SIDE_ILLUM_GUIDE
2
J90551011A
○
24 ..2 J90551009A MIRROR_ARM-R_ASSY
1
J90551009A
○
Reference