FX-3RA_电路图 - 第4页

HEAD UNIT(LF/LR) ....................................................................................................... 4- 25 HEAD UNIT(RF/RR) ............................................................................…

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Table of Contents
1 SYSTEM DIAGRAM
POWER UNIT ................................................................................................................. 1-1
SERVO MOTOR ............................................................................................................. 1-2
XY RELAY ...................................................................................................................... 1-3
Zθ POWER ....................................................................................................................... 1-4
Zθ MOTOR ....................................................................................................................... 1-5
HEAD LF/LR ..................................................................................................................... 1-6
HEAD RF/RR ................................................................................................................... 1-7
BASE CARRY .................................................................................................................. 1-8
OPERATION/CPU/MONITOR .......................................................................................... 1-9
FEEDER STATION .........................................................................................................1-10
MECH TOROLY I/F .........................................................................................................1-11
TOUCH PANEL OPERATION(CVS/RFID/TRACEABILITY) ...........................................1-12
ELEC TOROLY I/F ..........................................................................................................1-13
2 EPV SYSTEM DIAGRAM
LNC61/EPV63(LF) .......................................................................................................... 2-1
LNC61/EPV63(LR) ......................................................................................................... 2-2
LNC61/EPV63(RF) ......................................................................................................... 2-3
LNC61/EPV63(RR) ......................................................................................................... 2-4
Zθ MOTOR(LF) .............................................................................................................. 2-5
Zθ MOTOR(LR) .............................................................................................................. 2-6
Zθ MOTOR(RF) .............................................................................................................. 2-7
Zθ MOTOR(RR) .............................................................................................................. 2-8
3 IFS-NX OPTION (MPC-CAN)SYSTEM DIAGRAM
MECH TOROLY I/F (IFS-NX CAN) .................................................................................. 3-1
ELEC TOROLY I/F (IFS-NX CAN) ................................................................................... 3-2
MPC-CAN ......................................................................................................................... 3-3
4 WIRING DIAGRAM
POWER UNIT (1) ............................................................................................................. 4-1
POWER UNIT (2) ............................................................................................................. 4-2
SSC-NET .......................................................................................................................... 4-3
LINEAR MOTOR .............................................................................................................. 4-4
LINEAR SCALE (1) .......................................................................................................... 4-5
LINEAR SCALE (2) .......................................................................................................... 4-6
XY RELAY (POSITION BOARD) ...................................................................................... 4-7
FEEDER L PCB XY Relay (FL/RL) .................................................................................. 4-8
XY Relay (RF/RR) ............................................................................................................ 4-9
XY Relay (IO) ..................................................................................................................4-10
Zθ (LF) POWER ..............................................................................................................4-11
Zθ (LR) POWER ..............................................................................................................4-12
Zθ (RF) POWER .............................................................................................................4-13
Zθ (RR) POWER .............................................................................................................4-14
Zθ 1・2・3・4・5・6 MOTOR(LF) ................................................................................4-15
Zθ 1・2・3・4・5・6 MOTOR(LR) ................................................................................4-16
Zθ 1・2・3・4・5・6 MOTOR(RF) ................................................................................4-17
Zθ 1・2・3・4・5・6 MOTOR(RR) ...............................................................................4-18
LASER ALIGN (LF/LR) ....................................................................................................4-19
LASER ALIGN (RF/RR) ...................................................................................................4-20
HEAD UNIT(1) ...............................................................................................................4-21
HEAD UNIT(2) ...............................................................................................................4-22
HEAD UNIT(3) ...............................................................................................................4-23
HEAD UNIT(4) ...............................................................................................................4-24
HEAD UNIT(LF/LR) .......................................................................................................4-25
HEAD UNIT(RF/RR) ......................................................................................................4-26
FEEDER PCB CONNECTOR BRACKET ........................................................................4-27
FEEDER STATION L ......................................................................................................4-28
FEEDER STATION R ......................................................................................................4-29
FPI L (OPTION) ...............................................................................................................4-30
FPI R (OPTION) ..............................................................................................................4-31
MECH TROLLEY I/F(LF) .................................................................................................4-32
MECH TROLLEY I/F (LR) ...............................................................................................4-33
MECH TROLLEY I/F(RF) ................................................................................................4-34
MECH TROLLEY I/F (RR) ...............................................................................................4-35
CARRY MOTOR (L) ........................................................................................................4-36
CARRY MOTOR (R) ........................................................................................................4-37
CARRY MOTOR (CARRY) ..............................................................................................4-38
CARRY SENSOR ............................................................................................................4-39
OPERATION UNIT ..........................................................................................................4-40
CPU .................................................................................................................................4-41
CPU/MONITOR ...............................................................................................................4-42
CVS UNIT (OPTION) .......................................................................................................4-43
ELEC TROLLEY I/F(LF) ..................................................................................................4-44
ELEC TROLLEY I/F (LR) .................................................................................................4-45
ELEC TROLLEY I/F(RF) .................................................................................................4-46
ELEC TROLLEY I/F (RR) ................................................................................................4-47
RFID ................................................................................................................................4-48
5 EPV WIRING DIAGRAM
LASER ALIGN (LF,LR) ..................................................................................................... 5-1
LASER ALIGN (RF,RR) .................................................................................................... 5-2
EPV (LF) ........................................................................................................................... 5-3
EPV (LR) .......................................................................................................................... 5-4
EPV (RF) .......................................................................................................................... 5-5
EPV (RR) .......................................................................................................................... 5-6
ZT 1・2・3・4・5・6 MOTOR(LF) ................................................................................. 5-7
ZT 1・2・3・4・5・6 MOTOR(LR) ................................................................................. 5-8
ZT 1・2・3・4・5・6 MOTOR(RF) ................................................................................. 5-9
ZT 1・2・3・4・5・6 MOTOR(RR) ...............................................................................5-10
Zθ (LF) POWER ..............................................................................................................5-11
Zθ (LR) POWER ..............................................................................................................5-12
Zθ (RF) POWER .............................................................................................................5-13
Zθ (RR) POWER .............................................................................................................5-14
6 IFS-NX OPTION (MPC-CAN) WIRING DIAGRAM
IFS-NX OPTION(MPC-CAN) MECH TROLLEY I/F (LF) .................................................. 6-1
IFS-NX OPTION(MPC-CAN) MECH TROLLEY I/F (LR) .................................................. 6-2
IFS-NX OPTION(MPC-CAN) MECH TROLLEY I/F (RF) .................................................. 6-3
IFS-NX OPTION(MPC-CAN) MECH TROLLEY I/F (RR) ................................................. 6-4
IFS-NX OPTION(MPC-CAN) ELEC TROLLEY I/F (LF) .................................................... 6-5
IFS-NX OPTION(MPC-CAN) ELEC TROLLEY I/F (LR) ................................................... 6-6
IFS-NX OPTION(MPC-CAN) ELEC TROLLEY I/F (RF) ................................................... 6-7
IFS-NX OPTION(MPC-CAN) ELEC TROLLEY I/F (RR) ................................................... 6-8
1. SYSTEM DIAGRAM