np134 mechanical reference-1.1e.pdf.pdf - 第37页

Y -Slide SX040 SX042 SX050 SX052 X034 Y1 AXIS HOME Y1 AXIS -OT Y2 AXIS HOME Y2 AXIS +OT Y AXIS COLSION Y1_AXIS_ZERO Y1_AXIS_-OT Y2_AXIS_ZERO Y2_AXIS_+OT Y AXIS COLLISION CHECK NP1Tb052 Sensor No. INDICATION SIGNAL NAME N…

X-Slide

SX018

SX019

SX01A

SX038

SX039

SX03A

X1 AXIS HOME

X1 AXIS +OT

X1 AXIS -OT

X2 AXIS HOME

X2 AXIS -OT

X2 AXIS +OT

X1_AXIS_ZERO

X1_AXIS_+OT

X1_AXIS_-OT

X2_AXIS_ZERO

X2_AXIS_-OT

X2_AXIS_+OT

NP1Tb051

Sensor No.

INDICATION SIGNAL NAME

SX018

SX038

SX01A

SX03A

SX019

(Side 2)

(Side 1)

NP1MN058

SX039

Part 1 Chapter 4 Sensor Positions

Edition 1.0 1-4-2 NP-134E/134ME Mechanical

Y-Slide

SX040

SX042

SX050

SX052

X034

Y1 AXIS HOME

Y1 AXIS -OT

Y2 AXIS HOME

Y2 AXIS +OT

Y AXIS COLSION

Y1_AXIS_ZERO

Y1_AXIS_-OT

Y2_AXIS_ZERO

Y2_AXIS_+OT

Y AXIS COLLISION CHECK

NP1Tb052

Sensor No.

INDICATION SIGNAL NAME

NP1MN059

X034

SX052

SX050

SX042

SX040

(Side 2)

(Side 1)

Part 1 Chapter 4 Sensor Positions

Edition 1.0 1-4-3 NP-134E/134ME Mechanical

Head 1

SX000

SX008

SX010

X050

X051

X052

X053

I1 AXIS HOME

θ1 AXIS HOME

Z1 AXIS HOME

NZL CATCH OK1

CHG NZL NOTHING1

ST16 NZL CHK1

NZL END OK1

I 1_ AXIS_ZERO

θ1_AXIS_ZERO

Z1_ AXIS_ZERO

NOZZLE CATCH CHECK1

CHENGER NOZZLE EXIST CHECK1

16ST NOZZLE NORMAL POSITION CHECK1

NOZZLE END CHECK1

NP1Tb053a

Sensor No.

INDICATION SIGNAL NAME

SX000

SX010

X050 X052

X053

X051

SX008

NP1MN060

Part 1 Chapter 4 Sensor Positions

Edition 1.0 1-4-4 NP-134E/134ME Mechanical