P-209-001 - 第115页
MODEL TCM-X100J 0105-001 Key No. P AR T No. P AR T NAME Q’ ty REMARKS NOTE 113 JB-5 40 3 630 098 7386 P L A T E 1 766JB-010-403 40 5 630 000 0252 SEN SOR ,P HO TO 3 BPH44,BPH45,BPH46 766JB-010-405 40 6 630 000 0269 SEN S…
MODEL TCM-X100J
0212-002
112
X ゲޔY ゲ X AXIS, YAXIS
Fig. JB-5 Y ࠹ࡉ࡞ᬌㇱ Y Table Detector
415
See Fig.JB-4
Key No.301
406
405
409
412
414
409
412
414
409
412
414
405
406
406
405
406
413
411
407
403
413
411
407
MODEL TCM-X100J
0105-001
Key No. PART No. PART NAME Q’ty REMARKS
NOTE
113
JB-5
403 630 098 7386 PLATE 1 766JB-010-403
405 630 000 0252 SENSOR,PHOTO 3 BPH44,BPH45,BPH46
766JB-010-405
406 630 000 0269 SENSOR,PHOTO(CONNECTOR) 3 766JB-010-406
407 630 000 7633 BOLT,HEX-SCT 4 766JB-010-407
409 411 113 0502 SCR PAN 3X14 6 766JB-010-409
411 411 141 2905 WASHER SPR 4 4 766JB-010-411
412 411 086 4408 WASHER SPR 3 6 766JB-010-412
413 411 141 4008 WASHER V 4X9X0.8 4 766JB-010-413
414 411 088 9005 WASHER F 3X6X0.5 6 766JB-010-414
415 630 098 7393 PLATE 1 766JB-010-415
MODEL TCM-X100J
0105-001
114
XY ࠻࠶ࡊࡌࠬㇱ XY TOP BASE SECTION
Fig. JC-1 ࡃ࠶ࠢࠕ࠶ࡊࡌࠬ Back-up Base
8
See Fig.JC-4
Key No.302
See Fig.JB-4
Key No.314
See Fig.JB-4
Key No.302
8
3
2
1
14
10
9
4
5
17
20
6
9
10
27
18
21
14
17
20
31
24
25
12
12
BACK-UP PIN R1
13
26
16
19
26
16
19
28
29
30
19
16
26
19
16
26