sh030106u.pdf - 第11页

2 3.7.1 When you use the forc ed stop d eceleratio n functio n ...... .......................................................... 3-33 3.7.2 When you do not use the fo rced s top deceler ation f unc tion .................…

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CONTENTS
1. FUNCTIONS AND CONFIGURATION 1- 1 to 1-52
1.1 Summary ........................................................................................................................................... 1- 1
1.2 Function block diagram ..................................................................................................................... 1- 3
1.3 Servo amplifier standard specifications ........................................................................................... 1-13
1.4 Combinations of servo amplifiers and servo motors ........................................................................ 1-19
1.5 Function list ...................................................................................................................................... 1-21
1.6 Model designation ............................................................................................................................ 1-23
1.7 Structure........................................................................................................................................... 1-24
1.7.1 Parts identification ..................................................................................................................... 1-24
1.7.2 Removal and reinstallation of the front cover ............................................................................ 1-37
1.8 Configuration including peripheral equipment ................................................................................. 1-39
2. INSTALLATION 2- 1 to 2- 8
2.1 Installation direction and clearances ................................................................................................. 2- 2
2.2 Keeping out of foreign materials ....................................................................................................... 2- 4
2.3 Encoder cable stress ........................................................................................................................ 2- 4
2.4 SSCNET III cable laying ................................................................................................................... 2- 4
2.5 Inspection items ................................................................................................................................ 2- 6
2.6 Parts having service life .................................................................................................................... 2- 7
2.7 Restrictions when using this product at altitude exceeding 1000 m and up to 2000 m
above sea level ................................................................................................................................. 2- 8
3. SIGNALS AND WIRING 3- 1 to 3-48
3.1 Input power supply circuit ................................................................................................................. 3- 3
3.1.1 200 V class ................................................................................................................................. 3- 4
3.1.2 400 V class ................................................................................................................................ 3-10
3.1.3 100 V class ................................................................................................................................ 3-14
3.2 I/O signal connection example ......................................................................................................... 3-15
3.2.1 For sink I/O interface ................................................................................................................. 3-15
3.2.2 For source I/O interface ............................................................................................................ 3-17
3.3 Explanation of power supply system ............................................................................................... 3-18
3.3.1 Signal explanations ................................................................................................................... 3-18
3.3.2 Power-on sequence .................................................................................................................. 3-19
3.3.3 Wiring CNP1, CNP2, and CNP3 ............................................................................................... 3-20
3.4 Connectors and pin assignment ...................................................................................................... 3-24
3.5 Signal (device) explanations ............................................................................................................ 3-26
3.5.1 Input device ............................................................................................................................... 3-26
3.5.2 Output device ............................................................................................................................ 3-27
3.5.3 Output signal ............................................................................................................................. 3-28
3.5.4 Power supply ............................................................................................................................. 3-28
3.6 Forced stop deceleration function .................................................................................................... 3-29
3.6.1 Forced stop deceleration function ............................................................................................. 3-29
3.6.2 Base circuit shut-off delay time function ................................................................................... 3-31
3.6.3 Vertical axis freefall prevention function.................................................................................... 3-32
3.6.4 Residual risks of the forced stop function (EM2) ...................................................................... 3-32
3.7 Alarm occurrence timing chart ......................................................................................................... 3-33
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3.7.1 When you use the forced stop deceleration function ................................................................ 3-33
3.7.2 When you do not use the forced stop deceleration function ..................................................... 3-34
3.8 Interfaces ......................................................................................................................................... 3-35
3.8.1 Internal connection diagram ...................................................................................................... 3-35
3.8.2 Detailed explanation of interfaces ............................................................................................. 3-36
3.8.3 Source I/O interfaces ................................................................................................................ 3-38
3.9 SSCNET III cable connection .......................................................................................................... 3-39
3.10 Servo motor with an electromagnetic brake .................................................................................. 3-41
3.10.1 Safety precautions .................................................................................................................. 3-41
3.10.2 Timing chart ............................................................................................................................. 3-42
3.11 Grounding ...................................................................................................................................... 3-48
4. STARTUP 4- 1 to 4-20
4.1 Switching power on for the first time ................................................................................................. 4- 2
4.1.1 Startup procedure....................................................................................................................... 4- 2
4.1.2 Wiring check ............................................................................................................................... 4- 3
4.1.3 Surrounding environment ........................................................................................................... 4- 6
4.2 Startup............................................................................................................................................... 4- 6
4.3 Switch setting and display of the servo amplifier .............................................................................. 4- 8
4.3.1 Switches ..................................................................................................................................... 4- 8
4.3.2 Scrolling display ........................................................................................................................ 4-11
4.3.3 Status display of an axis ........................................................................................................... 4-12
4.4 Test operation .................................................................................................................................. 4-14
4.5 Test operation mode ........................................................................................................................ 4-14
4.5.1 Test operation mode in MR Configurator2 ................................................................................ 4-15
4.5.2 Motor-less operation in controller .............................................................................................. 4-18
5. PARAMETERS 5- 1 to 5-56
5.1 Parameter list .................................................................................................................................... 5- 1
5.1.1 Basic setting parameters ([Pr. PA_ _ ]) ...................................................................................... 5- 2
5.1.2 Gain/filter setting parameters ([Pr. PB_ _ ]) ............................................................................... 5- 3
5.1.3 Extension setting parameters ([Pr. PC_ _ ]) .............................................................................. 5- 4
5.1.4 I/O setting parameters ([Pr. PD_ _ ]).......................................................................................... 5- 6
5.1.5 Extension setting 2 parameters ([Pr. PE_ _ ]) ............................................................................ 5- 7
5.1.6 Extension setting 3 parameters ([Pr. PF_ _ ]) ............................................................................ 5- 8
5.1.7 Linear servo motor/DD motor setting parameters ([Pr. PL_ _ ]) ................................................ 5- 9
5.2 Detailed list of parameters ............................................................................................................... 5-11
5.2.1 Basic setting parameters ([Pr. PA_ _ ]) ..................................................................................... 5-11
5.2.2 Gain/filter setting parameters ([Pr. PB_ _ ]) .............................................................................. 5-22
5.2.3 Extension setting parameters ([Pr. PC_ _ ]) ............................................................................. 5-35
5.2.4 I/O setting parameters ([Pr. PD_ _ ])......................................................................................... 5-42
5.2.5 Extension setting 2 parameters ([Pr. PE_ _ ]) ........................................................................... 5-48
5.2.6 Extension setting 3 parameters ([Pr. PF_ _ ]) ........................................................................... 5-51
5.2.7 Linear servo motor/DD motor setting parameters ([Pr. PL_ _ ]) ............................................... 5-53
6. NORMAL GAIN ADJUSTMENT 6- 1 to 6-28
6.1 Different adjustment methods ........................................................................................................... 6- 1
6.1.1 Adjustment on a single servo amplifier ...................................................................................... 6- 1
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6.1.2 Adjustment using MR Configurator2 .......................................................................................... 6- 2
6.2 One-touch tuning .............................................................................................................................. 6- 3
6.2.1 One-touch tuning flowchart ........................................................................................................ 6- 5
6.2.2 Display transition and operation procedure of one-touch tuning ............................................... 6- 7
6.2.3 Caution for one-touch tuning ..................................................................................................... 6-17
6.3 Auto tuning ....................................................................................................................................... 6-18
6.3.1 Auto tuning mode ...................................................................................................................... 6-18
6.3.2 Auto tuning mode basis ............................................................................................................. 6-19
6.3.3 Adjustment procedure by auto tuning ....................................................................................... 6-20
6.3.4 Response level setting in auto tuning mode ............................................................................. 6-21
6.4 Manual mode ................................................................................................................................... 6-22
6.5 2 gain adjustment mode ................................................................................................................... 6-25
7. SPECIAL ADJUSTMENT FUNCTIONS 7- 1 to 7-38
7.1 Filter setting ...................................................................................................................................... 7- 1
7.1.1 Machine resonance suppression filter........................................................................................ 7- 2
7.1.2 Adaptive filter II ........................................................................................................................... 7- 5
7.1.3 Shaft resonance suppression filter ............................................................................................. 7- 7
7.1.4 Low-pass filter ............................................................................................................................ 7- 8
7.1.5 Advanced vibration suppression control II ................................................................................. 7- 8
7.1.6 Command notch filter ................................................................................................................ 7-13
7.2 Gain switching function .................................................................................................................... 7-15
7.2.1 Applications ............................................................................................................................... 7-15
7.2.2 Function block diagram ............................................................................................................. 7-16
7.2.3 Parameter .................................................................................................................................. 7-17
7.2.4 Gain switching procedure .......................................................................................................... 7-20
7.3 Tough drive function ........................................................................................................................ 7-24
7.3.1 Vibration tough drive function .................................................................................................... 7-24
7.3.2 Instantaneous power failure tough drive function ..................................................................... 7-26
7.4 Compliance with SEMI-F47 standard .............................................................................................. 7-30
7.5 Model adaptive control disabled ...................................................................................................... 7-33
7.6 Lost motion compensation function ................................................................................................. 7-34
7.7 Super trace control ........................................................................................................................... 7-37
8. TROUBLESHOOTING 8- 1 to 8-16
8.1 Explanation for the lists ..................................................................................................................... 8- 1
8.2 Alarm list ........................................................................................................................................... 8- 2
8.3 Warning list ...................................................................................................................................... 8-12
8.4 Troubleshooting at power on ........................................................................................................... 8-15
9. DIMENSIONS 9- 1 to 9-22
9.1 Servo amplifier .................................................................................................................................. 9- 1
9.2 Connector......................................................................................................................................... 9-20
10. CHARACTERISTICS 10- 1 to 10-16
10.1 Overload protection characteristics .............................................................................................. 10- 1
10.2 Power supply capacity and generated loss .................................................................................. 10- 5