SM310 Introduction(Chi, Ver4).pdf - 第97页

󲢓󲖚󰆢󰠺󳝹 7-1 1  7-10. ” 󲱨󲳖󱧐󱮴 " 󲢲󰔛 32.  <Station Utilities> 󲳞󰨠󲢪󳕎󱏃󰸋󰖕󰒺󲱨󰌄 󰠸 33. 󰊻󲳖󲖚󱱃󲲥󲔡 󲳯󲲜󲳖󲖚󱱃󰈓󳝡󰐏 PCB  34. 󰖕󰒺󲶽󱍙󰑔󰖕󰨠 󲱨󰌄󰠸  35. 󰖕󰒺 Sy …

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Samsung Component Placer SM310 Introduction
7-10
󰁺󱚢󱥐󰋋󰸼󰁺󰶎󰊎 SMEMA 󰊎󰦪󲢓󱱃
SM310: 󲔡 SM310 MMI SYS.SETUP(󲂱) 󲱨󲳖󰓶[F3]󱍙
<In-line Type>󲳞󳕎󳆃󲳞 Stand AloneBusy input only(2 󰁺󰶎)
SMEMA 󲳞󳕎
27. 󱈊󰭥󰟶󰖕󰒺󱕃󲢓󲶽󲳖󲖚󱱃󰌄󰏞󳍱󱕢
28. 󰑱󲢓󲲎󰌄󱍙󱈊󰭥
󰦽
󰑱󱈊󰭥󱈊󰭥󲢓󲶽󲲰󲔡󱕃󲡹󰏞
󱷒󲳵󲢓󰀴󱈊󰭥󲙖󲢓
󲶽󲲎󲲰󲔡󱕃󲡹
29. 󰑱󱛠󲱒 ON/OFF (Main Switch)󱍙<Main Start>
󰖕󰒺 Power Supply LED
󰖕󰒺 Emergency Switch  Door 󱍙󳋂󰾋
󰑱 EM 󳊽(Door Open)󰾋INTERLLED 
ON󰾋
󱕃󲡹PowerLED ON
󱕃󲡹 " PSOK" LED " ON"
󱕃󲡹 " DISB" LED " ON"
󰑱󲳅󰾋 LED 󰾋󱻉󲺜󱏍󰁿󰊒󲲰󳌋󰢊
󱛠󲱒󰑱󲢓󳐷󱍙<Emergency>
󱷒󱇴“I/O DPRAM Initialization Error” <Main Start>󲱒󱛠󰋋
󲙖󰖕󰒺󲢓󳐷󱍙<Emergency>󰌄󱮤󲖀󰈓󰑓
30. 󲂱󰐶󲳞󲢟󰊂(Diagnosis)󲱚󲂱󰐶󲳞<I/O>󰖕󰒺󱚢󱍙
󰾋
31. 󲂱󰐶󲳞󲢟󰊂(Diagnosis)󲱚󲂱󰐶󲳞<I/O>󲙖󰋋
<Move Rail>󳆃󲣘󰉉󲱨󲳖
󰦽
󲣘󱽗󲱨󲳖󱍙󰖕󰒺󲱨󲳖󲣘󱿘󰌄󰏞󳍱
󱕢󰼾󱷒󲱨󲳖󲳵󰀴.
󰸼
󰦽
󲢓󲖚󰆢󰠺󳝹
7-11
7-10. ”
󲱨󲳖󱧐󱮴
"
󲢲󰔛
32. <Station Utilities>󲳞󰨠󲢪󳕎󱏃󰸋󰖕󰒺󲱨󰌄󰠸
33. 󰊻󲳖󲖚󱱃󲲥󲔡󲳯󲲜󲳖󲖚󱱃󰈓󳝡󰐏 PCB
34. 󰖕󰒺󲶽󱍙󰑔󰖕󰨠󲱨󰌄󰠸
35. 󰖕󰒺 System Setup 󱍙 System Constant 
36. 󲂱󰐶󲳞󲢟󰊂(Diagnosis)󲱚󲂱󰐶󲳞<Vacuum>󰖕󰒺󱏴󱝏
( Z 󲱉󰖕󰒺󱏴󱝏󰌄󲩚󲲜 580mmHg)
37. Dry Run 󰊎󲲥󲱁󲢓󰖕󰒺 LSO 󰄙󰐏󱘏󰈮󰄙󰐏󱍙󰌄󰠸
󰠸󰔎󰁃󱇴󰠺󳝹󲲥󲱁󲢓
󰦽
󰑱󲙖󱛐󲢓󳙫󲙖󰠷󲢓󱍙 PC󳋂󱈊󰭥
󰸋󰸼󲳛󱍙󲖚󰠺󳝹No.1No.27󲢓󲖚󲩌
󰐺󲢓󱛐󰢪󲺢󰊅󲲰󲔡󲖚 (No.1No.38)
Samsung Component Placer SM310 Introduction
7-12
7.1. 󳕙󰷂Warming Up
Warming Up 󱍙󲲥󲔡󰌄󰂥󳞭󳌚󲨉󲖚󱦓󳌚󲨉󲖚󲲰󲔡󲳯󲲜 W
arming Up 󱍙󲲥󲔡󲶽󱍙󰩻󰮦󰦎󱠞󳕙󰷂󰠸󰫾󱳡󳌇󰠷
󰐛󱠞󱍙󰈋󱯾󱳡󲩌󱍙󳌚󲨉󲖚󱦓󱍙Warming Up 󰋋󳋉󱭻 10 󳅴
󰟶󳌚󲨉󲖚󱮨󰐴󲢓󰠷󲲥󲔡󰋋󳋉󲩚󲲜 2 󰋋󰋋󳏕
󲙖󲲰󲔡 Warming Up
󰦽
󰂥󳞭󲨉󲖚󱦓󱕃󲶽󳕐󲲰󲔡󳕙󰷂 󰂥󳞭󲨉󲖚󱦓󱕃
󲙖󲲥󲔡󲢓󲲰󲔡󳕙󰷂
1. MMI 󱍙󲂱󰓤󲳞 Utility󱇽󱛠󱍙󲱚󲂱󰓤 <
󳍤󰐏󲲥󲔡>  (F5)
󰌓󱘏󱍙󳍤󰐏󲲥󲔡󲢲󰔛
󰆢󰠺󳝹