HM-Series_TRM(Ver2.2_CS20.11) - 第197页
Page ohu~oh 195 HM520 / HM520h MF Head (2/5) NO. P A RT NO. P ART NA ME Q'TY Old No. Supply Supply L T Reference 1 AM0 3-025485A CABLE ASSY -H5 V AC BLOW SOL CABLE 1 O 2 AM0 3-025473A CABLE ASSY -H1 V AC BLOW SOL CA…

Page
ohu~oh
194
HM520 /
HM520h
MF Head (2/5)
1
2
3
4
5
6
BOARD
MF BASE
CN14
4P
CN12
3P*2EA
CN12-1
H4 VAC SOLENOID PORT
H4 BLOW SOLENOID PORT
NXD_MFHD_018(AM03-025484A)
H5 VAC SOLENOID PORT
H5 BLOW SOLENOID PORT
NXD_MFHD_019(AM03-025485A)
CN13
3P*2EA
H6 VAC SOLENOID PORT
H6 BLOW SOLENOID PORT
NXD_MFHD_020(AM03-025486A)
BOARD
MF BASE
CN11
CN11-1
DOUT(9)
5V_FID
NXD_MFHD_005(AM03-025472A)
CN14
CN14
4P
B2
A2
A1
B1
B2
A2
A1
B1
CN12
3P*2EA
CN12-1
H1 VAC SOLENOID PORT
H1 BLOW SOLENOID PORT
NXD_MFHD_006(AM03-025473A)
-
H2 VAC SOLENOID PORT
H2 BLOW SOLENOID PORT
NXD_MFHD_007(AM03-025474A)
CN13
3P*2EA
CN13-1
C1
-
A1
B1
C1
-
A1
B1
H3 VAC SOLENOID PORT
H3 BLOW SOLENOID PORT
NXD_MFHD_008(AM03-025475A)
C2
-
A2
B2
C2
-
A2
B2
3P*2EA
FID LED BD
1
2
CN11
3P*2EA
TOP
BOTTOM
-
+
FAN(AFB0424SHB)
+24V
GND
NXD_MFHD_021(AM03-0254656A)
3
4
+
-
N.C
N.C
CN11-2
Ver1.1
Ver1.1
CN12-2
CN13-2
C1
A1
B2
C1
A1
B1
C2
B2
A2
C2
B2
A2
C1
-
A1
B1
C1
A1
B1
C2
A2
B2
C2
A2
B2
CN11-1
CN14
B2
A2
A1
B1
B2
A2
A1
B1
CN12-1
-
CN13-1
C1
-
A1
B1
C1
-
A1
B1
C2
-
A2
B2
C2
-
A2
B2
CN11-2
CN12-2
CN13-2
C1
A1
B2
C1
A1
B1
C2
B2
A2
C2
B2
A2
C1
-
A1
B1
C1
A1
B1
C2
A2
B2
C2
A2
B2
+24V
H4_VAC
H4_BLOW
+24V
H5_VAC
H5_BLOW
+24V
H6_VAC
H6_BLOW
+24V
H1_VAC
H1_BLOW
+24V
H2_VAC
H2_BLOW
+24V
H3_VAC
H3_BLOW
N.C
N.C
N.C
N.C
N.C
N.C

Page
ohu~oh
195
HM520 /
HM520h
MF Head (2/5)
NO. PART NO. PART NAME Q'TY Old No. Supply Supply LT Reference
1 AM03-025485A CABLE ASSY-H5 VAC BLOW SOL CABLE 1 O
2 AM03-025473A CABLE ASSY-H1 VAC BLOW SOL CABLE 1 X
3 AM03-025472A CABLE ASSY-FIDCIAL POINTER CABLE ASSY 1 O
4 AM03-025486A CABLE ASSY-H6 VAC BLOW SOL CABLE 1 O
5 AM03-025474A CABLE ASSY-H2 VAC BLOW SOL CABLE 1 O
6 AM03-0254656A #N/A #N/A X

Page
ohu~oh
196
HM520 /
HM520h
MF Head (3/5)
1
BOARD
MF BASE
BOARD
MF BASE
CN15
6P
CN15
A2
A1
B1
A1
B1
B3
A3
B2
A2
B3
A3
B2
+5V
ANALOG+_A1(H5)
GND
ANALOG+_A3(H1)
FG
ANALOG+_A2(H3)
NXD_MFHD_011(AM03-025656A)
CN15
6P
CN15
TOP
BOTTOM
CN1
10P
CN1
B2
B3
A1
B4
A5
ANALOG+_A1(H6)
ANALOG+_A3(H2)
FG
ANALOG+_A2(H4)
CN1
10P
A2
A3
B1
A4
B5
BOARD
VACCUM SEN
B2
B3
A1
B4
A5
A2
A3
B1
A4
B5
SEN1
SEN3
+5V
SEN5
GND
SEN2
SEN4
+5V(N.C)
SEN6
GND(N.C)
Ver1.1
Ver1.1
A2
A1
B1
A1
B1
B3
A3
B2
A2
B3
A3
B2