HM-Series_TRM(Ver2.2_CS20.11) - 第198页
Page ohu~oh 196 HM520 / HM520h MF Head (3/5) 1 BOARD MF BASE BOARD MF BASE CN15 6P CN15 A2 A1 B1 A1 B1 B3 A3 B2 A2 B3 A3 B2 +5V ANALOG+_A1(H5) GND ANALOG+_A3(H1) FG ANALOG+_A2(H3) NXD_MFHD_01 1(AM03-025656A) CN15 6P CN15…
Page
ohu~oh
195
HM520 /
HM520h
MF Head (2/5)
NO. PART NO. PART NAME Q'TY Old No. Supply Supply LT Reference
1 AM03-025485A CABLE ASSY-H5 VAC BLOW SOL CABLE 1 O
2 AM03-025473A CABLE ASSY-H1 VAC BLOW SOL CABLE 1 X
3 AM03-025472A CABLE ASSY-FIDCIAL POINTER CABLE ASSY 1 O
4 AM03-025486A CABLE ASSY-H6 VAC BLOW SOL CABLE 1 O
5 AM03-025474A CABLE ASSY-H2 VAC BLOW SOL CABLE 1 O
6 AM03-0254656A #N/A #N/A X
Page
ohu~oh
196
HM520 /
HM520h
MF Head (3/5)
1
BOARD
MF BASE
BOARD
MF BASE
CN15
6P
CN15
A2
A1
B1
A1
B1
B3
A3
B2
A2
B3
A3
B2
+5V
ANALOG+_A1(H5)
GND
ANALOG+_A3(H1)
FG
ANALOG+_A2(H3)
NXD_MFHD_011(AM03-025656A)
CN15
6P
CN15
TOP
BOTTOM
CN1
10P
CN1
B2
B3
A1
B4
A5
ANALOG+_A1(H6)
ANALOG+_A3(H2)
FG
ANALOG+_A2(H4)
CN1
10P
A2
A3
B1
A4
B5
BOARD
VACCUM SEN
B2
B3
A1
B4
A5
A2
A3
B1
A4
B5
SEN1
SEN3
+5V
SEN5
GND
SEN2
SEN4
+5V(N.C)
SEN6
GND(N.C)
Ver1.1
Ver1.1
A2
A1
B1
A1
B1
B3
A3
B2
A2
B3
A3
B2
Page
ohu~oh
197
HM520 /
HM520h
MF Head (3/5)
NO. PART NO. PART NAME Q'TY Old No. Supply Supply LT Reference
1 AM03-025656A CABLE ASSY-MF HD FAN CABLE ASSY 1