YG200_YG200L_Mainte_E - 第67页

3-27 3 Periodic maintenance items 3 . 2 . 3 A t t a c h i n g t h e n o z z l e , l u b r i c a t i n g a n d c h e c k i n g n e g a t i v e p r e s s u r e A f t e r c l e a n i n g t h e s p l i n e s h a f t s , r e …

100%1 / 87
3-26
3
Periodic maintenance items
5
Blow air through the FNC spline air
path.
Use the air blow gun and IPA to clean the
spline shaft air path of Heads 2, 4 and 6 of
the "F" type machines .
1. As in step 4, connect a 4mm diameter air
tube (200mm long) to the air blow gun
(KU4-M8590-00X) via a joint ($US4).
2. Insert the air tube connected to the air
blow gun into the cleaning hole from the
above, and blow air through the spline
shaft from the top to bottom, while
placing cloth under the lower end of the
spline shaft to prevent the remaining IPA
from splattering.
3. Repeat step 3 to clean the inside of the
spline shaft and then blow air through it
again.
4. Next, place the air tube of the air blow
gun against the air path hole at the tip
of the FNC lock pin. At this point,
removing the joint from the air blow gun
and using the short sir tube originally
attached to the air blow gun would
make it easier to do this work.
5. Blow air through the spline shaft from the
bottom while lightly placing cloth over
the cleaning hole.
6. Repeat the above process a few times
until the IPA flowing out from the spline
shaft is clean.
53344-F8-00
6
Reattach the plug bolts into the
cleaning holes.
Use the M5 hex wrench to screw the 6 bolts
back into the cleaning holes to plug them.
Air blow from bottom
Step 5-5
Air tube from air blow gun
FNC lock pin
3-27
3
Periodic maintenance items
3.2.3 Attaching the nozzle, lubricating and checking negative pressure
After cleaning the spline shafts, reattach the nozzles and lubricate them. Also check the negative pressure
(vacuum level) as described below.
1
Install the FNC nozzle assemblies.
Reassemble the FNC nozzle assemblies by
referring to section 1.2.3, "Reassembling the
FNC nozzle assembly" in this chapter.
2
Lubricate each part.
Lubricating oil has been cleaned away by
IPA cleaning, so lubricate the following
parts. Prepare the oil syringe applicator
(KV8-M8870-00X) filled with turbine oil
(VG32).
1. On standard heads, apply one drop of
oil into the elongated holes at the joint
between the nozzle holder and the spline
shaft. (2 holes on each head) After
applying the oil, move the nozzle holder
up and down several times.
2. On FNC heads, pull down the FNC index
holder, and you will see two small cams
on the FNC spline shaft. Apply one drop
of oil onto each cam and then move the
cams up and down several times.
3. Apply one drop of oil to the inner side of
the FNC bevel gear and shaft, and then
spread out the oil with your finger.
53345-F8-00
c
CAUTION
Do not lubricate the bevel gear section, as oil attracts
dust or debris which might get caught in the gear.
3
Remove excess oil.
Using the air blow gun, blow air for about 5
seconds from the nozzle tip, and for about 5
seconds from the nozzle attachment side.
Repeat this process a few times to remove
excess turbine oil remaining in the nozzle.
n
NOTE
A thin coat of oil is enough to lubricate the slide section.
4
Check that the oil was removed.
If needed, blow air through the nozzle again
while using commercially-available oil
blotting paper, and check for residual oil in
the nozzle.
n
NOTE
Performing step 3 is usually sufficient to remove oil
remaining in the nozzle. However, if oil still remains then
blow air through the nozzle once again.
53371-F8-00
5
Reattach the nozzles.
Attach the nozzles back to the head after
checking one more time that there is no oil
remaining there.
Lubrication point
Step 2
FNC cam
Step 4
Checking for residual oil
Oil blotting paper
Oil will appear after blowing air (first
time) for about 5 seconds from the
nozzle tip.
Repeat the air blow for about 5
seconds each from the nozzle tip
and from the attachment side.
This task is finished when oil no
longer appears.
3-28
3
Periodic maintenance items
6
After assembly, check the vacuum
levels.
1. Change the nozzle of each FNC head to
Type 203F, while leave nozzles detached
from the standard heads.
2. Open the [Unit]-[Head] tab screen and
press the [Vacuum] button to generate a
negative pressure. Read the "Max" values
shown in red on the screen and
determine whether the vacuum levels
are appropriate by referring to the table
below.
54302-
F
8-00
7
Reattach the nozzles.
Attach the nozzles by hand back to the
standard heads.
n
Vacuum level in spline shaft air path
Nozzle
Typical criteria
FNC head with Type 203F
nozzle
If the "Max" value is less than 100 while the nozzle is open, the vacuum level is
normal.
If the "Max" value is more than 170 while the nozzle is sealed, the vacuum level
is normal.
Standard head with no nozzle
If the "Max" value is less than 80 while open, the vacuum level is normal.
If the "Max" value is more than 180 while sealed, the vacuum level is normal.
* The vacuum level in in the spline shaft air path might sometimes differ slightly depending on the air source and
operating conditions. Use the above criteria values for reference during maintenance.
Checking the negative pressures
Step 6
[Vacuum] button
Read "Max. values".