00195941-03-UM SiplaceCA-EN - 第168页
3 Technical Data User Manual SIPLACE CA 3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN 168 Wafer support Thewafer support is installe d on the XY -unit and so a part of the wafer t able. The wafers are fixed to this f…
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
167
Wafer table
Fig. 3.7 - 18 Wafer table
(1) Clamping unit
(2) Wafer camera
(3) Flip unit
(4) Wafer support
(5) Guide
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3 Technical Data User Manual SIPLACE CA
3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN
168
Wafer support
Thewafer support is installed on the XY-unit and so a part of the wafer table. The wafers are fixed
to this for the ejection procedure.
3
Fig. 3.7 - 19 Wafer support without a wafer inserted (example for 12")
(1) Pin for the locking and position detection of 12" wafers
(2) Wafer locking bar
NOTE 3
For processing of 8" wafers the wafer support has to be changed. Frames with 6" wafers can be
processed with appropriate adapters.
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2
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User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
169
Fig. 3.7 - 20 Wafer support with a wafer inserted (example for 12")
(1) Recess for the defined positioning at the pins of the locking bar
(2) Wafer locking bar
(3) Wafer
(4) Rail
NOTE 3
In case of 8"wafer supports care must be taken to ensure, that the wafer locking bar (2) is
installed so that the pins of the locking bar fit correctly into the recess of the wafer frame. Other-
wise the frame is not properly recognised during clamping.
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