00195941-03-UM SiplaceCA-EN - 第174页
3 Technical Data User Manual SIPLACE CA 3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN 174 3 Fig. 3.7 - 24 Wafer changer system (1) W afer changer with gripp er (2) Magazine lift 1 2
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
173
NOTE 3
In this first version there is no automatic ejection tool changer available. For this reason the SWS
can only process dies without interruption that can be ejected with the same ejection tool.
3.7.6.7 Wafer Changer System
The wafer changer system consists of the magazine lift and the wafer changer with gripper.
The wafer changer system is needed to ensure a fully automatic production with the SWS. The
operator is only needed for refilling the magazine lift with new wafer cassettes.
The wafers are provided in a wafer magazine. The wafer magazine is placed by the user into the
wafer magazine lift. The magazine lift lifts the wafer magazine into the appropriate height so that
the corresponding wafer is in handover position. In this position the wafer changer can take the
wafer out of the magazine and push it back in after the wafer has been processed.
The wafer changer consists primarily of the gripper unit and the guidance rails. The gripper unit
takes up the wafer and moves it to the position currently required.
3 Technical Data User Manual SIPLACE CA
3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN
174
3
Fig. 3.7 - 24 Wafer changer system
(1) Wafer changer with gripper
(2) Magazine lift
1
2
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
175
Magazine lift
3
Fig. 3.7 - 25 Magazine lift
(1) Magazine unit with changeover plate for inserting 8" and 12" magazine cassettes
(2) Motor
(3) Wafer changer with cover
3
Wafer changer
According to the location (2 and 4 or 1 and 3) there are two different versions of the wafer changer.
2
3
1