P-311-003 - 第154页

Fig. D1-6 エア配管 Air Piping 501 503 502 504 From Main Body T o Main Body 0912-002 Fig. D1 基板認識部 PEC RECOGNITION SECTION UNIT -3 Fig. D1 PEC RECG

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

401 223B0437 BALL_SCREW 1 209000610P-001

402 222F0026 BEARING_UNIT 1 209000610P-002

403 223C0260 COUPLING 1 209000610P-003

404 0900G12C BRACKET 1 209000610P-004

405 211DE050 PLATE 1 209000610P-005

406 0900610X ASSY_MOTOR 1 209000610P-006

407 221AA020 ROHS_HEX-SCT 4 209000610P-007

408 221AA018 ROHS_HEX-SCT 4 209000610P-008

Fig. D1

0912-002

Fig. D1-5

UNIT-3

Fig. D1

PEC RECG

SIGMA-P4

Fig. D1-6

エア配管

Air Piping

501

503

502

504

From Main Body

To Main Body

0912-002

Fig. D1

基板認識部

PEC RECOGNITION SECTION

UNIT-3

Fig. D1

PEC RECG

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

501 0900G11R TUBE 1 309000611Q-001

502 0900G11S TUBE 1 309000611Q-002

503 0900G113 PIPE_FITTING 1 309000611Q-003

504 0900G112 PIPE_FITTINGS 1 309000611Q-004

Fig.G

0912-002

Fig. D1-6

UNIT-3

Fig. D1

PEC RECG

SIGMA-P4