P-311-003 - 第219页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 1 102-003 230 221AA041 ROHS_HEX-SCT 4 109000700B-030 231 221HA006 WASHER 4 109000700B-031 232 221HA106 WASHER 4 109000700B-032 233 21 1AD926 COVER 1 109000700B-033 234 221…
Fig. F1-3
ノズルユニット
Nozzle Unit
Key No.B7
See Fig. F1-1
Key No.1
See Fig. F1-1
2C1
2A1
2A4
2A2
2A3
2B9
2B7
2B8
2B8
2B7
2A7
2A7
2C0
2A7
2B7
2B8
2B7
2B0
2B0
246
246
287
249
248
247
249
248
247
2B6
2B5
2B4
2B3
2B2
2B1
2B3
2B2
2B1
232
231
230
232
231
230
286
285
284
244
244
243
245
2A7
2A9
2A8
2A6
2A5
243
233
234
2F6
2F5
2F4
2F6
2F5
2F4
2E5
2E4
2E3
2D8
2D7
2D6
260
259
258
283
282
281
256
255
254
2D2
2F3
2F3
2F2
2E6
2E9
2E6
2E7
2G2
2G1
257
2E2
2G2
2D5
2D1
2D4
2D9
2D9
2F2
2E6
2E9
2E6
2E6
2F0
2F1
2E2
2E1
2E1
2D3
2E0
2D9
2E8
1102-003
Fig. F1
クリーニングユニット
CLEANING UNIT
UNIT-5
Fig. F1
CLEANING
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
1102-003
230 221AA041 ROHS_HEX-SCT 4 109000700B-030
231 221HA006 WASHER 4 109000700B-031
232 221HA106 WASHER 4 109000700B-032
233 211AD926 COVER 1 109000700B-033
234 221DA220 RO_MACHIN_SCREW 2 109000700B-034
243 226J1023 MECH_PARTS 4 109000700B-043
244 226J1022 MECH_PARTS 4 109000700B-044
245 225G0363 TUBE 1 109000700B-045
246 211FE089 BRACKET 2 109000700B-046
247 221AA016 ROHS_HEX-SCT 4 109000700B-047
248 221HA004 WASHER 4 109000700B-048
249 221HA104 WASHER 4 109000700B-049
254 221AA029 ROHS_HEX-SCT 3 109000700B-054
255 221HA005 WASHER 3 109000700B-055
256 221HA105 WASHER 3 109000700B-056
257 0900700E ASSY_VALVE 1 109000700B-057
258 221AA023 ROHS_HEX-SCT 2 109000700B-058
259 221HA004 WASHER 2 109000700B-059
260 221HA104 WASHER 2 109000700B-060
281 221AA017 ROHS_HEX-SCT 4 109000700B-081
282 221HA004 WASHER 4 109000700B-082
283 221HA104 WASHER 4 109000700B-083
284 221AA016 ROHS_HEX-SCT 2 109000700B-084
285 221HA004 WASHER 2 109000700B-085
286 221HA104 WASHER 2 109000700B-086
287 226J1024 MECH_PARTS 1 109000700B-087
2A1 0900H01C NOZZLE BASE 1 209000701B-001
2A2 211G6451 BLOCK 1 209000701B-002
2A3 211G5807 BLOCK 1 209000701B-003
2A4 211G6452 BLOCK 1 209000701B-004
2A5 211G6449 BLOCK 1 209000701B-005
2A6 211G6449 BLOCK 1 209000701B-006
2A7 226A0287 SEAL 6 209000701B-007
2A8 211G5815 BLOCK 1 209000701B-008
2A9 211G6500 BLOCK 1 209000701B-009
2B0 221AA006 ROHS_HEX-SCT 4 209000701B-010
2B1 221AA020 ROHS_HEX-SCT 2 209000701B-011
2B2 221HA004 WASHER 2 209000701B-012
2B3 221HA104 WASHER 2 209000701B-013
2B4 221AA023 ROHS_HEX-SCT 3 209000701B-014
2B5 221HA004 WASHER 3 209000701B-015
2B6 221HA104 WASHER 3 209000701B-016
2B7 225F0348 PIPE_FITTINGS 4 209000701B-017
2B8 225F0287 PIPE_FITTINGS 2 209000701B-018
2B9 225F0726 PIPE_FITTINGS 1 209000701B-019
Fig. F1-3
Fig. F1
UNIT-5
Fig. F1
CLEANING
SIGMA-P4
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
Fig. F1-3
1102-003
2C0 225G0361 TUBE 1 209000701B-020
2C1 211FD518 BRACKET 1 209000701B-021
2D1 225B0604 AIR LINE EQRT 1 2090007008-001
2D2 211FD534 BRACKET 1 2090007008-002
2D3 224A0050 VACUUE PUMP 1 2090007008-003
2D4 225F0407 PIPE_FITTINGS 1 2090007008-004
2D5 225F0407 PIPE_FITTINGS 1 2090007008-005
2D6 221AA016 ROHS_HEX-SCT 2 2090007008-006
2D7 221HA004 WASHER 2 2090007008-007
2D8 221HA104 WASHER 2 2090007008-008
2D9 225B0607 AIR LINE EQRT 3 2090007008-009
2E0 225F0407 PIPE_FITTINGS 1 2090007008-010
2E1 225B0603 AIR LINE EQRT 2 2090007008-011
2E2 225G0361 TUBE 1 2090007008-012
2E3 221AA016 ROHS_HEX-SCT 2 2090007008-013
2E4 221HA004 WASHER 2 2090007008-014
2E5 221HA104 WASHER 2 2090007008-015
2E6 225F0734 PIPE FITTINGS 6 2090007008-016
2E7 255F0733 PIPE FITTINGS 1 2090007008-017
2E8 225C0062 VALVE 1 2090007008-018
2E9 225F0732 PIPE FITTINGS 2 2090007008-019
2F0 225B0606 AIR_LINE_EQPT 1 2090007008-020
2F1 225F0731 PIPE FITTINGS 1 2090007008-021
2F2 225B0600 AIR_LINE_EQPT 2 2090007008-022
2F3 211FE931 BRACKET 2 2090007008-023
2F4 221AA021 ROHS_HEX-SCT 4 2090007008-024
2F5 221HA004 WASHER 4 2090007008-025
2F6 221HA104 WASHER 4 2090007008-026
2G1 0900H00V TUBE 1 309000700R-001
2G2 0900H00U TUBE 1 309000700R-002
Fig. F1
UNIT-5
Fig. F1
CLEANING
SIGMA-P4