P-311-003 - 第221页
MEMO
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
Fig. F1-3
1102-003
2C0 225G0361 TUBE 1 209000701B-020
2C1 211FD518 BRACKET 1 209000701B-021
2D1 225B0604 AIR LINE EQRT 1 2090007008-001
2D2 211FD534 BRACKET 1 2090007008-002
2D3 224A0050 VACUUE PUMP 1 2090007008-003
2D4 225F0407 PIPE_FITTINGS 1 2090007008-004
2D5 225F0407 PIPE_FITTINGS 1 2090007008-005
2D6 221AA016 ROHS_HEX-SCT 2 2090007008-006
2D7 221HA004 WASHER 2 2090007008-007
2D8 221HA104 WASHER 2 2090007008-008
2D9 225B0607 AIR LINE EQRT 3 2090007008-009
2E0 225F0407 PIPE_FITTINGS 1 2090007008-010
2E1 225B0603 AIR LINE EQRT 2 2090007008-011
2E2 225G0361 TUBE 1 2090007008-012
2E3 221AA016 ROHS_HEX-SCT 2 2090007008-013
2E4 221HA004 WASHER 2 2090007008-014
2E5 221HA104 WASHER 2 2090007008-015
2E6 225F0734 PIPE FITTINGS 6 2090007008-016
2E7 255F0733 PIPE FITTINGS 1 2090007008-017
2E8 225C0062 VALVE 1 2090007008-018
2E9 225F0732 PIPE FITTINGS 2 2090007008-019
2F0 225B0606 AIR_LINE_EQPT 1 2090007008-020
2F1 225F0731 PIPE FITTINGS 1 2090007008-021
2F2 225B0600 AIR_LINE_EQPT 2 2090007008-022
2F3 211FE931 BRACKET 2 2090007008-023
2F4 221AA021 ROHS_HEX-SCT 4 2090007008-024
2F5 221HA004 WASHER 4 2090007008-025
2F6 221HA104 WASHER 4 2090007008-026
2G1 0900H00V TUBE 1 309000700R-001
2G2 0900H00U TUBE 1 309000700R-002
Fig. F1
UNIT-5
Fig. F1
CLEANING
SIGMA-P4
MEMO
Fig. F1-4
ケーブル
Cable
Y56
Y57
Y59
Y5A
X1200
X1081
Y56
Y57
Y59
B85
B86
X1201
A
A
B81
B85
B86
M02
B84
B83
B84T
B82
306
306
306
303
305
306
302
301
303
304
305
0912-002
Fig. F1
クリーニングユニット
CLEANING UNIT
UNIT-5
Fig. F1
CLEANING