P-311-003 - 第44页
Fig. B1-1F 固定ネジ ( 手前基準 ) Fixed Screw(Front Reference) 15 39 36 26 27 1 1 10 28 Key No.566 See Fig. B1-6 Key No.748 See Fig. B1-8F Key No.648 See Fig. B1-7F Key No.591 See Fig. B1-6 18 1 Key No. See Fig. B1-2 Key No.207 S…

1102-003
Fig. B1
09004000
TABLE UNIT
09004003
M TABLE ASSY
09004002
U TABLE ASSY
FIXED CHUTE ASSY
SENSOR ASSY
0900400A
09004007
FIXED MOTOR ASSY
09004008
MOVED MOTOR ASSY
09004009
X AXIS MOTOR ASSY
09004001
PARTS
(Fig. B1-10 Key No.904-917)
PARTS
(Fig. B1-9 Key No.804-821)
PARTS
(Fig. B1-4 Key No.364-376)
PARTS
(Fig. B1-5 Key No.464-472)
P
ARTS
(Fig. B1-6 Key No.566-5B0)
PARTS
(Fig. B1-3 Key No.204-220)
P
ARTS
(Fig. B1-2 Key No.154-161)
P
ARTS
(Fig. B1-7 Key No.604-630)
PARTS
(Fig. B1-8 Key No.701-737)
P
ARTS
(Fig. B1-7 Key No.644-658)
P
ARTS
(Fig. B1-4 Key No.322-354
Fig. B1-5 Key No.407-455
Fig. B1-6 Key No.506-549)
PARTS
(Fig. B1-9 Key No.831-837)
PARTS
(Fig. B1-10 Key No.924-933)
Z MOTOR ASSY
0900400D
MOVED CHUTE ASSY
0900402Y
PARTS
(Fig. B1-8 Key No.744-758)
PARTS
(Fig. B1-8 Key No.761)
P
A
PAR
TS
(Fig. B1-11 Key No.A01-A15)
AIR PIPING
0900403R
AL BASE ASSY
09004005
BACK UP PLATE ASSY
CABLE
09004047 09004048
0900400B
BACK UP MOTOR ASSY
09004030
CHUTE HABA ASSY
09004004
L TABLE ASSY
PARTS
(Fig. B1-2 Key No.105-144)
0900400C
PARTS
(Fig. B1-1 Key No.9-48)
θ MOTOR ASSY
A
A
Fig. B1-A3
UNIT-1
Fig. B1
TABLE

Fig. B1-1F
固定ネジ ( 手前基準 )
Fixed Screw(Front Reference)
15
39
36
26
27
11
10
28
Key No.566
See Fig. B1-6
Key No.748
See Fig. B1-8F
Key No.648
See Fig. B1-7F
Key No.591
See Fig. B1-6
181Key No.
See Fig. B1-2
Key No.207
See Fig. B1-3
Key No.612
See Fig. B1-7F
Key No.710
See Fig. B1-8F
Key No.A21
11See Fig. B1-
Key No.806
See Fig. B1-9
Key No.831
See Fig. B1-9
Key No.591
See Fig. B1-6
29
39
17
24
9
11
27
26
25
36
15
12
23
40
13
14
19
30
27
26
36
26
27
33
32
31
41
18
23
16
37
22
21
20
48
47
46
45
44
43
1102-003
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE

1102-003
Fig. B1
15
39
36
26
27
11
10
28
Key No.566
See Fig. B1-6
Key No.748
See Fig. B1-8F
Key No.710
See Fig. B1-8F
Key No.A21
11See Fig. B1-
Key No.806
See Fig. B1-9
Key No.831
See Fig. B1-9
Key No.591
See Fig. B1-6
29
39
17
24
9
11
36
19
30
27
26
36
26
27
33
32
31
41
18
Fig. B1-1F
UNIT-1
Fig. B1
TABLE