P-311-003 - 第59页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 322 223B0449 BALL_SCREW 3 1090004003-022 323 223Q0746 PULLEY_TIMING 3 1090004003-023 324 223L0389 BEL T_TIMING 1 1090004003-024 325 222D0022 BEARING_RADIAL 4 1090004003-02…
Fig. B1-4
Z
軸駆動部
Z Axis Driving Section
327
327
327
322
322
322
368
323
323
323
336
336
336
330
334
370
369
365
324
329
367
350
351
352
350
351
352
374
375
353
354
376
372
371
373
347
366
335
335
335
366
364
364
325
325
326
See Fig. B1-6
Key No.591
0912-002
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
322 223B0449 BALL_SCREW 3 1090004003-022
323 223Q0746 PULLEY_TIMING 3 1090004003-023
324 223L0389 BELT_TIMING 1 1090004003-024
325 222D0022 BEARING_RADIAL 4 1090004003-025
326 221K0077 RING_C_12 2 1090004003-026
327 216K0157 SET COLLAR 3 1090004003-027
329 213B0120 PULLEY 2 1090004003-029
330 0900E03H BOSS(PIN) 2 1090004003-030
334 211DD916 PLATE 2 1090004003-034
335 222F0012 BEARING_UNIT 3 1090004003-035
336 226H0085 CLAMP 3 1090004003-036
347 221AA032 ROHS_HEX-SCT 12 1090004003-047
350 221HA006 WASHER 4 1090004003-050
351 221HA304 ROHS_WASHER 4 1090004003-051
352 221AA046 ROHS_HEX-SCT 4 1090004003-052
353 221AA047 ROHS_HEX-SCT 2 1090004003-053
354 221HA106 WASHER 2 1090004003-054
364 222D0025 BEARING_RADIAL 2 309000400A-004
365 223Q0620 PULLEY_TIMING 1 309000400A-005
366 216K0085 SET_COLLAR 1 309000400A-006
367 223C0263 COUPLING 1 309000400A-007
368 0900403B ASSY_MOTOR 1 309000400A-008
369 211FE170 BRACKET 1 309000400A-009
370 211DD755 PLATE 1 309000400A-010
371 221AA032 ROHS_HEX-SCT 4 309000400A-011
372 221HA005 WASHER 4 309000400A-012
373 221HA105 WASHER 4 309000400A-013
374 221AA018 ROHS_HEX-SCT 2 309000400A-014
375 221HA004 WASHER 2 309000400A-015
376 221HA104 WASHER 2 309000400A-016
Fig. B1
0912-002
Fig. B1-4
UNIT-1
Fig. B1
TABLE
SIGMA-P4
Fig. B1-5
バックアップ駆動部
Back Up Driving Section
421
418
464
467
468
469
431
412
414
439
440
441
443
444
445
442
443
444
450
451
452
454
455
470
471
472
407
417
416
417
416
417
417
416
446
416
419
432
433
432
420
432
433
432
418
418
419
419
420
418
419
431
428
448
428
448
428
448
465
465
466
See Fig. B1-6
Key No.591
0912-002
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE