P-311-003 - 第80页
Fig. B1-10 X 軸モータ、 Z 軸センサ X Axis Motor , Z Axis Sensor 925 926 927 928 931 930 929 931 930 929 931 930 929 931 930 929 932 930 929 932 930 929 932 930 929 933 930 929 924 924 927 924 924 904 905 908 907 909 910 91 1 912 …
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
804 226J0882 SCREW_PLUGS 2 1090004002-004
805 225F0345 PIPE_FITTINGS 1 1090004002-005
806 0900E04R BASE 1 1090004002-006
807 211G5724 BLOCK 1 1090004002-007
808 0900E01Z SENSOR_DOG 1 1090004002-008
809 211DD917 PLATE 1 1090004002-009
810 216E1739 PIN_LOCATE 4 1090004002-010
811 221HA004 WASHER 4 1090004002-011
812 221HA104 WASHER 4 1090004002-012
813 221AA017 ROHS_HEX-SCT 4 1090004002-013
814 221AA020 ROHS_HEX-SCT 12 1090004002-014
815 221AA021 ROHS_HEX-SCT 3 1090004002-015
817 221BA022 BOLT_HEX 4 1090004002-017
818 221FA009 NUT_HEX 4 1090004002-018
819 221AA060 BOLT_HEX-SCT 2 1090004002-019
820 222K0234 SHAFT_LINEAR 1 1090004002-020
821 222K0233 SHAFT_LINEAR 2 1090004002-021
831 0900E01H PLATE 1 2090004047-001
832 0900E054 PLATE 1 2090004047-002
833 0900E028 COVER 2 2090004047-003
834 0900E029 COVER 2 2090004047-004
836 0900E02B COVER 2 2090004047-006
837 221AA006 ROHS_HEX-SCT 8 2090004047-007
Fig. B1
1102-003
Fig. B1-9
UNIT-1
Fig. B1
TABLE
SIGMA-P4
Fig. B1-10
X
軸モータ、
Z
軸センサ
X Axis Motor, Z Axis Sensor
925
926
927
928
931
930
929
931
930
929
931
930
929
931
930
929
932
930
929
932
930
929
932
930
929
933
930
929
924
924
927
924
924
904
905
908
907
909
910
911
912
917
916
913
906
See Fig. B1-2
Key No.118
0912-002
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
904 223B0432 BALL_SCREW 1 3090004001-004
905 216K0156 SET COLLAR 1 3090004001-005
906 222F0026 BEARING_UNIT 1 3090004001-006
907 223C0260 COUPLING 1 3090004001-007
908 0900403C ASSY_MOTOR 1 3090004001-008
909 211FD325 BRACKET 1 3090004001-009
910 221AA019 ROHS_HEX-SCT 4 3090004001-010
911 221HA004 WASHER 4 3090004001-011
912 221HA104 WASHER 4 3090004001-012
913 221AA020 ROHS_HEX-SCT 4 3090004001-013
916 221BA030 ROHS_BOLT_HEX 1 3090004001-016
917 221FA011 NUT_HEX 1 3090004001-017
924 23G10001 SENSOR_PHOTO 5 3090004007-004
925 0900E055 BRACKET 1 3090004007-005
926 211DA761 PLATE 1 3090004007-006
927 211DA762 PLATE 2 3090004007-007
928 211DE761 PLATE 1 3090004007-008
929 221AA006 ROHS_HEX-SCT 8 3090004007-009
930 221HA003 WASHER 16 3090004007-010
931 221HA103 WASHER 16 3090004007-011
932 221DA012 MACHINE_SCREW 6 3090004007-012
933 221DA016 MACHINE SCREW 2 3090004007-013
Fig. B1
1102-003
Fig. B1-10
UNIT-1
Fig. B1
TABLE
SIGMA-P4