SIPLACE X-Series (SIPLACE X-Series S, from SC 708.1) Edition 05/2015 EN User manual - 第157页
User manual SIPLACE X-Series 3 Technical data and assemblies From software version 708.1 Version 05/2015 3.6 Gantry system 157 3.6.8 Y axis structure 3 Fig. 3.6 - 6 Y -axis structure (example of SIPLACE X2 S / X3 S / X4 …
3 Technical data and assemblies User manual SIPLACE X-Series
3.6 Gantry system From software version 708.1 Version 05/2015
156
3.6.6 Technical data for X axis SIPLACE X2 S / X3 S / X4 S / X4i S
3
3.6.7 Technical data for X axis SIPLACE X4 S micron / X4i S micron
3
Drive Linear motor (primary drive)
Max. speed 2.5 m/s
Distance measuring system Linear metal scale
Resolution 1 µm
Drive Linear motor (primary drive)
Max. speed 2.5 m/s
Distance measuring system Linear metal scale
Resolution 0.5 µm
User manual SIPLACE X-Series 3 Technical data and assemblies
From software version 708.1 Version 05/2015 3.6 Gantry system
157
3.6.8 Y axis structure
3
Fig. 3.6 - 6 Y-axis structure (example of SIPLACE X2 S / X3 S / X4 S shown)
The Y axis essentially consists of the following main modules:
(1) Y linear motors (primary part) on the X axis with fixed and loose bearing mounted
(2) Permanent magnet (secondary part of the X-axis linear motor)
(3) Linear distance measuring system
(4) Guidance system
(1)
(4)
(2)
(3)
(4)
3 Technical data and assemblies User manual SIPLACE X-Series
3.6 Gantry system From software version 708.1 Version 05/2015
158
3.6.9 Technical data for Y axis SIPLACE X2 S / X3 S / X4 S / X4i S
3
3.6.10 Technical data for Y axis SIPLACE X4 S micron / X4i S micron
3
Drive Linear motor (primary drive)
Max. speed 2.5 m/s
Distance measuring system Linear metal scale
Resolution 1 µm
Drive Linear motor (primary drive)
Max. speed 2.5 m/s
Distance measuring system Linear metal scale
Resolution 0.5 µm