ServiceInstruction_Vision XP - 第26页
Page 22 Vision XP+ V AC 2 M aintenance 2.5 Pro cess chamber Operating Instructions V ersion 1.5 2.5.6 Cleaning the Curtains Fig. 2-1 7 Bottom Curtain s Fig. 2-1 8 T op curtains (2-part) Fig. 2-1 9 Push the clips up with …
Vision XP+ VAC Page 21
2 Maintenance
2.5 Process chamber
Operating Instructions
Version 1.5
2.5.5 Cleaning the Guide Rails for the Sheet Metal Covers
The guide rails for the sheet metal cover are located at the inlet and the out-
let.
Fig. 2-16 Cleaning the Guide Rails
Consumable materials:
• Oven cleaner
• Rags
Procedure:
1. Raise the process chamber as
far as it will go. Set width adjust-
ment to the maximum value and
move the center support to the
middle.
2. Unscrew the sheet metal cover
(A) and pull it out.
3. Clean the groove in the top (B)
and bottom (C) guide rails with
a screwdriver, rags and oven
cleaner.
A
B
C
Page 22 Vision XP+ VAC
2 Maintenance
2.5 Process chamber
Operating Instructions
Version 1.5
2.5.6 Cleaning the Curtains
Fig. 2-17 Bottom Curtains
Fig. 2-18 Top curtains (2-part)
Fig. 2-19 Push the clips up with prying tool
Consumable materials:
• Oven cleaner
• Rags
• Prying tool
Procedure:
1. Raise the process chamber.
2. Lift the curtains out of the sys-
tem along with the mounting
bracket.
3. Clean all curtains, the mounting
bracket and the interior of the
process chamber with oven
cleaner and a rag.
If the curtains are excessively dam-
aged they must be replaced.
Procedure:
1. Push up the clips at the left and
right-hand sides of the mount-
ing rail with the prying tool.
2. Remove the old curtain.
3. Insert the new curtain.
4. Replace the clips.
Vision XP+ VAC Page 23
2 Maintenance
2.5 Process chamber
Operating Instructions
Version 1.5
2.5.7 Cleaning the Seal
Fig. 2-20 Cleaning the Process Chamber
Seal
The seals must be clean and un-
damaged in order to assure reliable
production.
Consumable materials:
• Appropriate cleaning agent
• Rags
Procedure:
1. Raise the process chamber.
2. Clean the process chamber
seals with Appropriate cleaning
agent and a rag.
3. Clean all contamination from
the sheet metal panel at the
mating side of the seal.
4. The seals at the system’s inlet
and outlet must be cleaned us-
ing the same procedure.
Seals