ERR-LIST-ACM - 第12页
572 Transport :\tGeneral failure. An unknown error occurred on the transport. Retry the error. 573 Transport :\tUnable to retrieve errors. The control software was not able to retrieve the errors on the transport control…
562
Transport :\tMissing board in run-
out.
A request was made to move a
board out the work-area. The
movement was started but the
board was not detected within the
time frame on the first sensor in
the run-out section.
- Board stuck between work-area and run-out.
- Defective sensor (first sensor in run-out).
- The first sensor in the run-out is not correctly adjusted.
- Defective wiring I/O.
- First sensor in run-out not correctly adjusted.
- Check the width of the transport system ,if necessary adjust the width.
- Retry the operation and continue.
- Check the first sensor in the run-out.
- Check wiring I/O.
- Check sensor adjustment.
563
Transport :\tMissing board at run-
out stop sensor.
A board was detected at the first
sensor in the run-out. However,
the board was not detected within
the time frame
on the second sensor in the run-
out section.
- Board stuck between first and second sensor of run-out.
- Defective sensor (second sensor in run-out).
- The second sensor in the run-out is not correctly adjusted.
- Defective wiring I/O.
- Second sensor in run-out not correctly adjusted.
- Check the width of the transport system ,if necessary adjust the width.
- Retry the operation and continue.
- Check the second sensor in the run-out.
- Check wiring I/O.
- Check sensor adjustment.
564
Transport :\tPrevious board did not
leave work-area
The transport was not able to
position a board in the work-area
because the previous board did
not leave the work-area in time.
- Board stuck between work-area and run-out.
- Sensor malfunction.
- Board is larger as specified in action spec.
- Remove the board for work-area.
- Adjust action spec.
565
Transport :\tUnable to position
board in work-area
The transport is not able to
position a board on the second
sensor in the work-area.
- Transport speed is too large.
- Acceleration is too low.
- reduce board transfer speed.
- enlarge the belt acceleration.
566
Transport :\tIllegal state to execute
command (%1)
Command refused because the
transport controller firmware is in a
wrong state. Software error.
- Retry and continue.
- Restart the system.
- Report error to your service representative.
567
Transport : Transport width out of
range (command: %1)
The requested function cannot be
executed because one or more
parameters (e.g. transport width)
are invalid.
- Coplanarity checker, Flux unit or Wafer handler has been
configured;
maximum transport width when Coplanarity checker
configured: 406mm.
maximum transport width when Flux unit configured: 350
mm.
maximum transport width when W
- Check transport width and modify when necessary.
- Retry and continue.
- Restart the system.
568
Transport :\tCommand (%1) is
refushed
A message is refushed by the
transport controller.
- A command was given to the transport while the same
command was already executing. This might appear when a
transport jogging is in progress.
- Software error.
- Retry the operation.
- Report error to your service representative.
569
Transport :\tTime-out occurred
while executing command (%1)
A transport command is not
finished within a fixed time frame.
- Transport speed is too low.
- Hardware failure.
- Software error.
- Retry the operation.
- Report error to your service representative.
570 Unable to start the transport
The system was not able to start
the transport.
- No servo power present.
- Transport hardware failure. - Switch on servo power.
571
Transport :\trecovery failed, please
check transport
This message is obsolete and
should not occur. - Report error to your service representative.
572 Transport :\tGeneral failure.
An unknown error occurred on the
transport. Retry the error.
573
Transport :\tUnable to retrieve
errors.
The control software was not able
to retrieve the errors on the
transport controller.
- Communication error.
- This is an internal software error. - Check the communication link with the transport controller.
574 Transport :\tCommunication error
A communication error to the
transport controller occurred. - Internal communication failed. - Check the communication link with the transport controller.
575 Transport :\tError clamping board
An occurred while clamping the
board in the work-area.
- Servo power lost during the movement of the lift.
(Cover opened, emergency button pushed)
- Check the board in the work-area.
- Close cover or release emergency button.
- Retry operation and continue, if not correct contact your service
representative.
576
Unexpected board detected in
work area
A board was detected in the work-
area to which no order was
allocated. - A board was put in the work-area. - Remove the board and continue.
577
Possible mismatch between
physical and reported board
locations
Dialog items/functions are
enabled/disabled based on the
presence/absence of boards in the
machine.
- Since the machine has not been started at this moment, there
might be a mismatch between the actual board status and the
reported one. - Start the transport.
578
Transport :\tExternal amplifier
error
The external amplifier DCPA
reports an error.
- The external amplifier DCPA is not correctly connected.
- The emergency circuit has been activated during a movement
of the transport system.
- Check the wiring of the external amplifier as it is mentioned in the Service
Manual.
- Check emergency circuit ( cover, emergency button).
- Retry action if not correct, contact your service representative.
579
Transport :\tboard position in run-
in unknown
The state of the run-in section of
the transport, and therefore the
board position in the run-in is
unknown.
- An attempt to start the transport in order to enable error
recovery was made. However, due to the fact that the board
position in the run-in is unknown, the transport could not be
started. - Retry the transport error.
580
Transport :\tboard position in work-
area unknown
The state of the work-area section
of the transport, and therefore the
board position in the work-area is
unknown. Each time a board is
unclamped, the board position
becomes unknown.
- An attempt to start the transport in order to enable error
recovery was made. However, due to the fact that the board
position in the work-area is unknown, the transport could not be
started. - Retry the transport error.
581
Transport :\tboard position in run-
out unknown
The state of the run-out section of
the transport, and therefore the
board position in the run-out is
unknown.
- An attempt to start the transport in order to enable error
recovery was made. However, due to the fact that the board
positions in the run-out is unknown, the transport could not be
started. - Retry the transport error.
582
Cannot transport verification board
out of work-area
It is not possible to transport the
verification board out of the work-
area. - Remove board manually from work-area.
583
Transport :\tTimeout on activating
mechanical stopper
The actual movement of the
stopper is checked by a sensor.
The sensor didn't signal the
requested movement in time.
- The stopper moves too slow because of excessive friction
- The pressure of the compressed air is too low or completely
absent
- The compressed air valve or its control signal is
malfunctioning
- The sensor which detects the position is malfunctioning
- If the stopper doesn't move at all:
Check the compressed air, the valve and the wiring to the valve
- If the stopper moves
Check the sensor and its wiring
- Exchange the stopper
584
Transport :\tTimeout on
deactivating mechanical stopper
The actual movement of the
stopper is checked by a sensor.
The sensor didn't signal the
requested movement in time
- The stopper moves too slow because of excessive friction
- The pressure of the compressed air is too low or completely
absent
- The compressed air valve or its control signal is
malfunctioning
- The sensor which detects the position is malfunctioning
- If the stopper doesn't move at all:
Check the compressed air, the valve and the wiring to the valve
- If the stopper moves
Check the sensor and its wiring
- Exchange the stopper
600 %1 :\tFirst tracking warning Z Tracking warning Z Mechanical friction too high Lubricate Z Motor Rack and Gear as described in the Service Manual
601
%1 :\tFirst tracking warning phi
Tracking warning PHI
Mechanical friction too high
See Service Manual
602 %1 :\tTracking warning Z Tracking warning Z Mechanical friction too high Lubricate Z Motor Rack and Gear as described in the Service Manual
603
%1 :\tTracking warning phi
Tracking warning PHI
Mechanical friction too high
See Service Manual
610 %1 :\tNo message
During communication an error
has been signalized.
611 %1 :\tTracking warning lift
Lift position deviation larger than
allowed in position warning
window.
- Mechanical friction too high.
- Warning window too small.
612 %1 :\tTracking warning puller
Puller position deviation larger
than allowed in position warning
window.
- Mechanical friction too high.
- Warning window too small.
613 %1 :\tTracking warning snap-in
Snap-in position deviation larger
than allowed in position warning
window.
- Mechanical friction too high.
- Warning window too small.
614 %1 :\tSafety door open Trolley safety door is open.
-Trolley door is opened (during production).
- Power failure on piggyback board controller (during
initialization).
- Close door !!!!
- Check fuse on piggyback board, if broken replace it. If the problem still exits,
contact your service representative.
615 %1 :\tStorage error carrier (front)
The laser beam at the front side of
the trolley is obstructed.
- One of the carriers is not in the correct position.
- The adjustment of the laser beam is not correct.
- Check if all carriers are in the correct position.
- If that problem still exists, contact your service representative.
616
%1 :\tChannel run out of
components - Refill feeder channel.
617
%1 :\tEmpty pocket detected
- Continue.
618
Feeder Section %1 :\tFeeder %2,
Channel %3 is almost empty
Feeder
section is
almost empty
The selected feeder carrier is
almost empty. - After eject, refill the carrier.
619 %1 :\tFirmware restart
Communication error has been
occurred (bitbus error).
620
%1 :\tIndex checking
Index checking.