TX_V2_年保养英文 - 第42页
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11 WF 4 TX-Series V2 Clean the fiducial bars (TX V2 micron and HD only) 5 min 1 / 1
CAUTION! Refer to safety instructions in user manual before commencing Maintenance
Machine Status OFF Transport Empty
NOTICE! ESD guidelines are to be followed Tool: Wear Part: Consumables:
C3
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1 Carefully clean the glass fiducial bars at all
locations.
2 Carefully clean the calibration boards at all
locations.
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12 WF 4 TX-Series V2 Maintenance Check and clean the gas pressure shock absorber 1 min 1 / 2
CAUTION! Refer to safety instructions in user manual before commencing Maintenance
Machine Status OFF Conveyor Empty
NOTICE! ESD guidelines are to be followed Tool: Wear Part: Consumables:
C3
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1 Clean the cover sliding surface. 2 Open and close the cover several times. 3 Check if oil is visible.
4 If NOT go to step 6. 5 If YES contact service for exchange. 6 Repeat steps 1 to 5 for the second ab-
sorber.