YSB55w_KLG_MPL - 第55页
KLG-1608 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level 1 KL Y -M172A-0…
KLG-1608
47
45
46
52
32
33
35
35
11
5
12
7
6
24
1
39
40
24
19
17
41
14
16
24
28
26
19
34
21
30
23
13
18
34
3
29
51
10
22
27
37
33
52
25
4
35
19
22
15
50
48
8
35
8
32
31
6
50
49
2
40
44
39
29
34
28
20
45
20
26
18
18
41
35
27
35
27
9
36
22
27
27
48
43
44
47
42
47
38
47
45
47
45
46
52
32
33
35
35
11
5
12
7
6
24
1
39
40
24
19
17
41
14
16
24
28
26
19
34
21
30
23
13
18
34
3
29
51
10
22
27
37
33
52
25
4
35
19
22
15
50
48
8
35
8
32
31
6
50
49
2
40
44
39
29
34
28
20
45
20
26
18
18
41
35
27
35
27
9
36
22
27
27
48
43
44
47
42
47
38
47
45
12
2
Rack Assy
Wafer Elevation
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M172A-00 PLATE1, RACK 1 /
Í
2 KLY-M172D-00 PLATE, TOP 1 /
Í
3 KLY-M172G-00 RAIL 3 2 A
4 KLY-M172H-00 BRACKET, SENSOR 1 /
Í
5 KLY-M172J-00 RACK LOCK ASSY. 1 /
Í
6 KLY-M1731-00 PLATE 1, RAIL 2 /
Í
7 KLY-M1734-00 RAIL 8 1 A
8 KLY-M1735-00 RAIL 9 2 A
9 KLY-M173R-00 RAIL 12 2 A
10 KLY-M173S-00 PLATE 3, RAIL 2 /
Í
11 KLY-M173T-00 BLOCK, STOPPER 1 /
Í
12 KLY-M17SC-00 PLATE 3, RACK 1 /
Í
13 KLY-M17SD-00 PLATE 4, RACK 1 /
Í
14 KLY-M17SE-00 PLATE 5, RACK 1 /
Í
15 KLY-M17SF-00 PLATE 6, RACK 1 /
Í
16 KLY-M17W6-00 PLATE, COVER 1 /
Í
17 KLY-M654B-00 SENS,CST DET ASSY 1 B
Í
18 KLC-M910N-00 SPACER 8 /
Í
19 $NK-3N NYLON CLIP 5
20 90990-31J023 BOLT, SHOULDER 2
21 90990-28J141 WASHER,PLAIN 8
22 90990-41J138 COLLAR 12
23 90990-41J166 COLLAR 2
24 90990-11J001 SCREW, PAN HEAD W/W 5
25 98902-03010 SCREW BINDING HEAD 2
26 92012-04006 BOLT, BOTTON HEAD 8
27 91312-04005 BOLT HEX,SOCKET HEAD 16
28 91312-04006 BOLT HEX,SOCKET HEAD 6
29 91312-04008 BOLT HEX,SOCKET HEAD 8
30 91312-04010 BOLT HEX,SOCKET HEAD 8
31 91312-04020 BOLT HEX,SOCKET HEAD 2
32 91312-05008 BOLT HEX,SOCKET HEAD 10
33 91312-05010 BOLT HEX,SOCKET HEAD 6
34 92902-04200 WASHER,PLAIN 12
35 92902-05200 WASHER,PLAIN 22
36 KLY-M17A1-00 PLATE, SET 1 /
Í
37 KLY-M172U-00 PLATE 2, FRAME 2 /
Í
38 KLY-M172Y-00 RAIL 7 1 A
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39 KLY-M1735-00 RAIL 9 2 A
40 KLY-M1736-00 PLATE, ANGLE 2 /
Í
41 KLY-M173R-00 RAIL 12 2 A
42 KLY-M173S-00 PLATE 3, RAIL 1 /
Í
43 KLC-M910N-00 SPACER 4 /
Í
44 90990-28J141 WASHER,PLAIN 6 /
Í
45 90990-41J138 COLLAR 7
46 91312-04005 BOLT HEX,SOCKET HEAD 4
47 91312-04006 BOLT HEX,SOCKET HEAD 11
48 91312-04008 BOLT HEX,SOCKET HEAD 4
49 92012-04006 BOLT, BOTTON HEAD 4
50 92902-04200 WASHER,PLAIN 4
51 KLY-M1729-00 RACK ASSY. 1 /
Í
52 91312-05014 BOLT HEX,SOCKET HEAD 6
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12
2
Rack Assy
Wafer Elevation
