YSB55w_KLG_MPL - 第56页
KLG-1608 12 16 3 20 4 16 22 2 14 22 11 21 19 22 5 13 19 9 7 10 15 1 6 19 22 16 14 23 17 18 11 16 8 12 16 3 20 4 16 22 2 14 22 11 21 19 22 5 13 19 9 7 10 15 1 6 19 22 16 14 23 17 18 11 16 8 12 3 Cover Assy Wafer Elevation
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M172A-00 PLATE1, RACK 1 /
Í
2 KLY-M172D-00 PLATE, TOP 1 /
Í
3 KLY-M172G-00 RAIL 3 2 A
4 KLY-M172H-00 BRACKET, SENSOR 1 /
Í
5 KLY-M172J-00 RACK LOCK ASSY. 1 /
Í
6 KLY-M1731-00 PLATE 1, RAIL 2 /
Í
7 KLY-M1734-00 RAIL 8 1 A
8 KLY-M1735-00 RAIL 9 2 A
9 KLY-M173R-00 RAIL 12 2 A
10 KLY-M173S-00 PLATE 3, RAIL 2 /
Í
11 KLY-M173T-00 BLOCK, STOPPER 1 /
Í
12 KLY-M17SC-00 PLATE 3, RACK 1 /
Í
13 KLY-M17SD-00 PLATE 4, RACK 1 /
Í
14 KLY-M17SE-00 PLATE 5, RACK 1 /
Í
15 KLY-M17SF-00 PLATE 6, RACK 1 /
Í
16 KLY-M17W6-00 PLATE, COVER 1 /
Í
17 KLY-M654B-00 SENS,CST DET ASSY 1 B
Í
18 KLC-M910N-00 SPACER 8 /
Í
19 $NK-3N NYLON CLIP 5
20 90990-31J023 BOLT, SHOULDER 2
21 90990-28J141 WASHER,PLAIN 8
22 90990-41J138 COLLAR 12
23 90990-41J166 COLLAR 2
24 90990-11J001 SCREW, PAN HEAD W/W 5
25 98902-03010 SCREW BINDING HEAD 2
26 92012-04006 BOLT, BOTTON HEAD 8
27 91312-04005 BOLT HEX,SOCKET HEAD 16
28 91312-04006 BOLT HEX,SOCKET HEAD 6
29 91312-04008 BOLT HEX,SOCKET HEAD 8
30 91312-04010 BOLT HEX,SOCKET HEAD 8
31 91312-04020 BOLT HEX,SOCKET HEAD 2
32 91312-05008 BOLT HEX,SOCKET HEAD 10
33 91312-05010 BOLT HEX,SOCKET HEAD 6
34 92902-04200 WASHER,PLAIN 12
35 92902-05200 WASHER,PLAIN 22
36 KLY-M17A1-00 PLATE, SET 1 /
Í
37 KLY-M172U-00 PLATE 2, FRAME 2 /
Í
38 KLY-M172Y-00 RAIL 7 1 A
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39 KLY-M1735-00 RAIL 9 2 A
40 KLY-M1736-00 PLATE, ANGLE 2 /
Í
41 KLY-M173R-00 RAIL 12 2 A
42 KLY-M173S-00 PLATE 3, RAIL 1 /
Í
43 KLC-M910N-00 SPACER 4 /
Í
44 90990-28J141 WASHER,PLAIN 6 /
Í
45 90990-41J138 COLLAR 7
46 91312-04005 BOLT HEX,SOCKET HEAD 4
47 91312-04006 BOLT HEX,SOCKET HEAD 11
48 91312-04008 BOLT HEX,SOCKET HEAD 4
49 92012-04006 BOLT, BOTTON HEAD 4
50 92902-04200 WASHER,PLAIN 4
51 KLY-M1729-00 RACK ASSY. 1 /
Í
52 91312-05014 BOLT HEX,SOCKET HEAD 6
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
12
2
Rack Assy
Wafer Elevation
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M17K1-00 COVER, FRONT 1 /
Í
2 KLY-M17K2-00 COVER, RIGHT 1 /
Í
3 KLY-M17K3-00 COVER, LEFT 1 /
Í
4 KLY-M17K4-01 COVER, REAR 1 /
Í
5 KLY-M17K9-01 PLATE, RACK 2 /
Í
6 KLY-M17LF-01 PLATE 2, RACK 1 /
Í
7 KLY-M17LG-01 COVER 2, REAR 1 /
Í
8 KLY-M17LJ-00 COVER 2, RIGHT 1 /
Í
9 KLY-M17LP-00 COVER, DRAIN 1 /
Í
10 KLY-M17LS-00 COVER 3, REAR 1 /
Í
11 KLY-M173L-00 STAY 2, CONNECT 2 /
Í
12 KH2-M1130-00 CATCH,MAGNET 2 /
13 KV7-M1396-00 WASHER 4 /
Í
14 90990-11J003 SCREW, PAN HEAD W/W 8
15 90990-11J004 SCREW, PAN HEAD W/W 4
16 90990-46J010 BOLT, THIN HEAD 37
17 90990-28J082 WASHER,PLAIN 8
18 90990-28J127 WASHER,PLAIN 8
19 92902-05200 WASHER,PLAIN 6
20 98702-03006 SCREW,FLAT HEAD 4
21 91312-04008 BOLT HEX,SOCKET HEAD 3
22 91312-05010 BOLT HEX,SOCKET HEAD 14
23 91312-06012 BOLT HEX,SOCKET HEAD 8
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
12
3
Cover Assy
Wafer Elevation