YSB55w_KLG_MPL - 第6页

KLG-1608 9 13 23 23 22 19 10 10 22 26 22 11 22 12 5 6 23 23 2 17 23 16 15 14 22 22 22 25 24 7 4 21 8 3 18 20 22 22 1 23 9 13 23 23 22 19 10 10 22 26 22 11 22 12 5 6 23 23 2 17 23 16 15 14 22 22 22 25 24 7 4 21 8 3 18 20 …

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KLB-1608
14 Wafer Ejector Section
Ejector Head ...........................................14-1
15 Flip Head Section
Head Assy ...............................................15-1
Shank / Dust Box ....................................15-2
16 Wafer Traverser Section
Valve Panel Assy .................................... 16-1
17 Wafer Shuttle ST Section
Valve Panel ............................................. 17-1
Shank ......................................................17-2
18 Tools Section
Tools ........................................................18-1
KLG-1608
9
13
23
23
22
19
10
10
22
26
22
11
22
12
5
6
23
23
2
17
23
16
15
14
22
22
22
25
24
7
4
21
8
3
18
20
22
22
1
23
9
13
23
23
22
19
10
10
22
26
22
11
22
12
5
6
23
23
2
17
23
16
15
14
22
22
22
25
24
7
4
21
8
3
18
20
22
22
1
23
1
1
Sub Assy
Base
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLG-M111K-00 COVER 1K 1 /
Í
2 KLG-M111L-00 COVER 1L 1 /
Í
3 KLG-M111M-00 PLATE 1M 1 /
Í
4 KLG-M111N-00 PLATE 1N 1 /
Í
5 KLG-M1163-00 PLATE,INTERFACE 2 1 /
Í
6 KLG-M1167-00 BRKT.,INTERFACE 2 1 /
Í
7 KLG-M11G0-01 BRKT.,MAIN SWITCH 1 /
Í
8 KLG-M11G1-01 BOX,MAIN SWITCH 1 /
Í
9 KLG-M111V-00 PLATE 1V 1 /
Í
10 KLG-M111W-00 PLATE 1W 2 /
Í
11 KLG-M111T-00 PLATE 1T 1 /
Í
12 KLG-M111U-00 PLATE 1U 1 /
Í
13 KLG-M1155-00 BRACKET,NOISE FILTER 1 /
Í
14 KLG-M1154-00 BRACKET,STAND W 1 /
Í
15 KKX-M8596-00 PRESSURE GAUGE 1 /
Í
16 KLF-M8513-01 PRECISION REGULATOR 1 /
Í
17 KLG-M1111-01 PLATE 11 1 /
Í
18 KLG-M1165-01 PLATE 65 1 /
Í
19 KLW-M1180-00 LEVELING BOLT ASSY. 6 /
20 91312-05018 BOLT,HEX.SOCKET HEAD 4
21 91312-06020 BOLT,HEX.SOCKET HEAD 4
22 97602-05310 SCREW,PAN HEAD W/W 23
23 90990-11J003 SCREW,PAN HEAD W/W 48
24 90990-12J001 SCREW, BIN. HEAD W/W 4
25 90990-12J004 SCREW, BIN. HEAD W/W 4
26 90563-03J050 SPACER BOLT 11
27
28
29
30
31
32
33
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
1
1
Sub Assy
Base