YSB55w_KLG_MPL - 第78页

KLG-1608 15 13 9 5 8 14 6 15 8 6 13 3 14 11 12 7 2 4 1 2 7 10 10 7 1 2 12 2 11 7 15 13 9 5 8 14 6 15 8 6 13 3 14 11 12 7 2 4 1 2 7 10 10 7 1 2 12 2 11 7 17 2 Shank Wafer Shuttle ST

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KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M7S45-00 BRKT.,VALVE 2 /
Í
2 KLY-M7S38-00 BRKT.,CABLE FIX 4 /
Í
3 KLY-M7S47-00 BRKT.,VALVE 2 2 /
Í
4 KLY-M7SVA-00 SHUTTLE VALVE A 1 /
Í
5 KLY-M7SVB-00 SHUTTLE VALVE B 1 /
Í
6 KLY-M654E-A0 SENS,S-A1 FLOW ASSY 1 B
Í
7 KLY-M654E-B0 SENS,S-A2 FLOW ASSY 1 B
Í
8 $KM-10 MUFFLER 1 /
Í
9 KGS-M7742-00 LABEL,NOZZLE 2 /
Í
10 KLY-M654E-C0 SENS,S-B1 FLOW ASSY 1 B
Í
11 KLY-M654E-D0 SENS,S-B2 FLOW ASSY 1 B
Í
12 KGS-M5184-00 SEAL,EARTH 1 2 /
Í
13 91312-03006 BOLT HEX,SOCKET HEAD 20
14 91312-03008 BOLT HEX,SOCKET HEAD 8
15 97602-04306
SCREW PAN HEAD W/WASHER
4
16 91312-04008 BOLT HEX,SOCKET HEAD 8
17 92902-03200 WASHER,PLAIN 8
18 KLY-M7SA4-00 VALVE PANEL A ASSY 1 /
Í
19 KLY-M7SB4-00 VALVE PANEL B ASSY 1 /
Í
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
17
1
Valve Panel
Wafer Shuttle ST
KLG-1608
15
13
9
5
8
14
6
15
8
6
13
3
14
11
12
7
2
4
1
2
7
10
10
7
1
2
12
2
11
7
15
13
9
5
8
14
6
15
8
6
13
3
14
11
12
7
2
4
1
2
7
10
10
7
1
2
12
2
11
7
17
2
Shank
Wafer Shuttle ST
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M7S24-00 SHANK 12U1 32 E
2 KLY-M7SC2-00 SPRING PLUNGER 64 E
3 KLY-M7T24-00 SHANK,12U 2 E
4 KLY-M7T24-10 SHANK,12C 2 E
5 KLY-M7T24-20 SHANK,METAL 2 E
6 KLY-M7T26-00 PLATE,SHANK 4 E
7 95307-03700 NUT HEXAGON 64 E
8 90990-08J029 SCREW, PAN HEAD 8 E
9 90990-19J004 NEEDLE PIN 2 E
10 KLY-M7SC1-00 SHANK 12U1 ASSY 32
Conic rubber tip
E
11 KLY-M7SC1-10 SHANK 12C ASSY 32
Column rubber tip
E
12 KLY-M7S24-10 SHANK 12C 32 E
13 KLY-M7TC1-00 SHANK 12U ASSY. 2 E
14 KLY-M7TC1-10 SHANK 12C ASSY. 2 E
15 KLY-M7TC1-20 SHANK METAL ASSY. 2 E
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
17
2
Shank
Wafer Shuttle ST