SM411 Administrator’s Guide(Chi Ver1) - 第335页
Machine Calibration 14.3.10.5. Fly Ca ) T ool libration 1. ANC 1 CN400 2. Gantry > …
Samsung Component Placer SM411 Administrator’s Guide
Head XY Offset Calibration
Head 1 X : -0.04mm ~ 0.04mm, Head 1 Y : -0.03mm ~ 0.03mm
Head 2 X : 29.96mm ~ 30.04mm, Head 2 Y : -0.03mm ~ 0.03mm
Head 3 X : 59.96mm ~ 60.04mm, Head 3 Y : -0.03mm ~ 0.03mm
Head 4 X : 89.96mm ~ 90.04mm, Head 4 Y : -0.03mm ~ 0.03mm
Head 5 Y : -0.03mm ~ 0.03mm Head 5 X : 119.96mm ~ 120.04mm,
150.04mm, Head 6 Y : -0.03mm ~ 0.03mm Head 6 X : 149.96mm ~
14-56
Machine Calibration
14.3.10.5. Fly Ca
)
Tool
libration
1. ANC 1 CN400
2.
Gantry
>
amera Scale>”
mera Scale Calibration
(Scale
ANC Tool
Fly-Camera Scale Ca
<>
<> <10. Fly Camera Scale>
<> Head
<>
<> <
Head <>
<10. Fly C
Z []”
Z <>
3. Z
4. 1
” 1 Calibration Tool
5. []” Head
ANC Calibrration Tool <>
6. []” <>
7. r
8.
1”
, Head Assembly
” []
<>
“
Assembly
”
1 Align Mirro
”
[].” <>”
<
>”” SMVison Calibration Tool
14-57
Samsung Component Placer SM411 Administrator’s Guide
Fiducial Mark <>
9. ool Fiducial Mark 2 Tool
ANC Tool Tool Fiducial Mark 2
T
14-58