SM411F_Service Manual - 第163页
Electric Device Connection of the VME I/O Board Connector
Electric Device
Connection of the VME3100 Board and CAN Board
Connector connection is complete
TRAY1
TRAY 2
JOG BOX
Electric Device
Connection of the VME I/O Board Connector
Electric Device
3.4. Head Module Board Assembly
3.4.1. Representative Cases to Replace the Head Module Board Assembly
MPU-Stop error occurred (CAN HEAD I/O BOARD)
Defective operation of various sensors/cameras on the head (CAN HEAD I/O
BOARD)
Defective various illuminators on the head (CAN HEAD ILL BOARD)
C
AN H
e
a
d
I
/O
B
o
ar
d
CAN Head
Illumination Board
Vacuum Sensor Board
C
am
e
ra I
/O
B
o
ar
d