SM411F_Service Manual - 第52页

1.2.3. Fiducial Camera Scale Calibration If the fiducial camera is not calibrated, the rest of the buttons are disabled.  <1. Fid> button T each the position of the Reference fiducial mark located at the top surfa…

1.2.2. Skew compensation

Skew means compensating the skew occurred horizontally in the X-axis frame

against the Y1-axis and Y2-axis after movement of equipment. This must be done

upon initial installation and after movement of the equipment to a new location.

Method of skew compensation for Y-axis is as follows;

Caution

<Skew Compensation> must be performed before ‘return to

origin’ following initial installation or movement of

equipment. Otherwise, the equipment may be damaged

during operation.

 First, move the X frame manually to the center of equipment.

 Click on the <Skew compensation> button. Automatic homing on Z-axis is

performed, Y1-axis motor rotates and moves X frame until detecting the Y

home sensor. Once the home sensor has been detected, move to the Y-axis

movement distance (Y Stroke) in the opposite direction, and move to the

opposite direction again until the Y Home sensor is detected.

 Then, ‘Skew’ information is shown as follows, and asks whether to apply the

value.

 Click on the <Yes(Y)> button and <Update> button, and then homing of the

equipment is newly done in accordance with the applied skew information.

1.2.3. Fiducial Camera Scale Calibration

If the fiducial camera is not calibrated, the rest of the buttons are disabled.

 <1. Fid> button

Teach the position of the Reference fiducial mark located at the top surface of

the ANC.

The following is the process that performs teaching of the calibration tool

placed on the top surface of the ANC by using the Reference fiducial camera.

1. When performing the mark setup, select the gantry and click the <1. Fid>

button. If the following screen appears, click the <Move> button in the

<Teach> group.

Then the fiducial camera moves to the corresponding position. The mark

ID of Gantry 1 is fixed as No. "7", and No. "8" for Gantry 2.

2. If the corresponding fiducial mark cannot be recognized correctly, teach

the position of the Reference fiducial mark at the center of the calibration

tool placed on the top surface of the ANC.

3. If the fiducial mark position teaching is performed accurately, click the

<OK> button to apply the changed value.

4. Perform calibration for Gantry 2 in the same manner.

 <2. Fid Cam Scale> button

Perform calibration of the fiducial camera. There is no calibration required to

be done in advance in order to calibrate the scale (um/pixel) and rotation (deg)

of the fiducial camera. No separate jig is needed to perform the calibration.

The following is the procedure to calibrate the ‘fiducial camera scale’:

1. Click the <2. Fid Cam Scale> button in the <Calibration Menu> group.

2. If the <2. Fid Cam Scale> button is clicked, a message “Fid-Cam will

Move to Specific Fiducial Mark’s Position. Click [Next] to Move.” appears