SM411F_Service Manual - 第6页
11 X-Y SPEC. X-Y SPEC. X Y 1.8 m/sec, 3G 1.8 m/sec, 3G Max. Accerlation H/W Limit S/W Limit 995 mm 989 mm Y-Range H/W Limit S/W Limit 758 mm 752 mm X-Range Y: 3.0 μ m/pulse X: 3.2 μ m/pulse Resolution ± 0.01 mm Repea…
9
X Frame
X Frame
10
Y Frame
Y Frame
Y-Motor Block
Bearing Support
Bearing Housing
11
X-Y SPEC.
X-Y SPEC.
X
Y
1.8 m/sec, 3G
1.8 m/sec, 3G
Max.
Accerlation
H/W Limit
S/W Limit
995 mm
989 mm
Y-Range
H/W Limit
S/W Limit
758 mm
752 mm
X-Range
Y: 3.0 μm/pulse
X: 3.2 μm/pulse
Resolution
± 0.01 mm
Repeat
accuracy
X 1:1 , Y 1:1
Reduction
rate
750 W
1000 W * 2
X: AC Servo + Ball Screw
Y: AC Servo + Ball Screw (Twin)
Mechanism
Remarkoptionsection
X
Y
1.8 m/sec, 3G
2.0 m/sec, 3G
Max.
Accerlation
H/W Limit
S/W Limit
768 mm
764 mm
Y-Range
H/W Limit
S/W Limit
743 mm
739 mm
X-Range
Y: 3.0 μm/pulse
X: 3.2 μm/pulse
Resolution
± 0.01 mm
Repeat
accuracy
X 1:1 , Y 1:1
Reduction
rate
750 W
1000 W * 2
X: AC Servo + Ball Screw
Y: AC Servo + Ball Screw (Twin)
Mechanism
Remarkoptionsection
• SM421 • SM411(F)
12
Head
Head
Air Moudle(not compatible)
Fiducial Camera
Handle(common in SM310)
Teaching
Beam(option)
CAMERA_COVER_BOARD_ASSY
FLY_CAM_ONE_KIT_ASSY_F16
(FLY_CAM_ONE_KIT_ASSY_MEGA-F16)
Grease nipple(X-axis)
HEAD I/O B’d
HEAD ILL. B’d
Mirror Motor
Light ASSY
13
Head
Head
SM411/421
Differences
Teaching Beam
option
• SM421
• SM411
14
Head
Head
• SM411F