SM411F_Service Manual - 第93页
CNT20 nozzle that is seen in the ‘ SMV ision ’ window can be seen clearly . 6. Then the message “ Align T ool for Calibration! Then Click [Next ] ” appears. Click the <Next> button.. 7. Then the Z-axis of Head1 m o…

1.2.10.5. Fly Camera Scale Calibration
This calibration is performed to find the scale and rotation offset of the fly-camera.
In order to calibrate the scale and rotation of the fly-camera, the ‘fix-camera
calibration’ and ‘head Z-offset calibration’ must be performed in advance and the
CNT20 Nozzle must be used.
The following is the procedure to calibrate the ‘Fly-Camera Scale Calibration’
1. Click the <Nozzle Prepare> button and insert the CNT20 nozzle into the No. 1
hole of the ANC manually.
If the <9. Fly Camera Scale> is clicked after selecting the <Automatic Next>
check box, calibration is performed for the selected gantry automatically.
If calibration is performed after selecting the <No Real Motion [Manual]>
check box, the nozzle is inserted into each head manually. Click the <Next>
button to move onto the next step.
If calibration is performed without selecting either the <Automatic> check box
or <Manual> check box, the nozzle is changed automatically for the currently
selected nozzle. Click the <Next> button to move onto the next step.
2. If the <9. Fly Camera Scale> button is clicked, the message box “First, We
must Put all Nozzles From Heads on Manually. To Move down Z Axis, Click
[Next]” appears in the message box. Click the <Next> button to move down
the Z axis of the head in order to remove all nozzles inserted in the nozzle-
holder of the head manually.
3. Then, after the head assembly moves to the designated position, move all Z-
axes down. At this time, remove all inserted nozzles manually.
4. Then the message “Next Attach the Calibration Tool to Head 1. Click [Next]
for Moving Down Head. After Moving, Attach the Tool to head Manually”
appears. Click the <Next> button after inserting the CNT20 nozzle in the
nozzle-holder of Head #1 manually.
5. The message “Move To Center Position of [Fix1] Camera. To Move, Click
[Next]” appears. Click the <Next> button to move the corresponding head to
the center of the Fix1-camera. At this time, select the ‘Fix1 Cam’ in the <Target
Camera> combo box. Click the <Light…> button and adjust the brightness of
the light in the ‘Light Control’ dialog box so that the fiducial mark on the

CNT20 nozzle that is seen in the ‘SMVision’ window can be seen clearly.
6. Then the message “Align Tool for Calibration! Then Click [Next]” appears.
Click the <Next> button..
7. Then the Z-axis of Head1 moves up to the ‘‘part-alignment height’’ and the
mirror is closed. After that, the message “Calibration is Prepared. To Calibrate,
Click [Next]” appears in the message box. At this time, select the ‘Fly Cam1’
in the <Target Camera> combo box. Click the <Light…> button and adjust the
brightness of the light in the ‘Light Control’ dialog box so that the fiducial
mark on the CNT 20 nozzle that is seen in the ‘SMvision’ window can be seen
clearly. Then click the <Next> button.
8. The calibration is performed automatically. If it is completed, the calibration
result is displayed as shown in the following figure. Click the <Next> button.
9. Then the message “Next, Remove the Calibration Tool From Head 1. Click
[Next] for Moving Down Head. After Moving, Remove the Tool Manually”
appears. Click the <Next> button to remove the calibration tool from the
nozzle-holder of Head #1 manually.
10. Form Fly-Camera #2 to Fly-Camera #6, perform calibration in the same

manner as it was performed for Fly-Camera #1.
11. If the calibration procedure is completed for all fly-cameras normally, the
result is displayed as shown in the following figure. Click the <Update> button
to apply the calibration value..
The range of the reference values for the ‘fly-camera calibration’ is as follows:
FOV 16
ScaleX: 33.34~35.42 (μm/pixel)
ScaleY: 33.34~35.42 (μm/pixel)
FOV 25 (MEGA)
ScaleX: 15.39~16.35 (μm/pixel)
ScaleY: 15.39~16.35 (μm/pixel)
"Memo