P-0260-004.pdf - 第15页
MODEL EG-100 1004-003 13 Key No. P AR T No. P AR T NAME Q’ty REMARKS New Code NOTE 1 6301471891 PLA TE,LOCA TE 3 846C--010-001 216H0458 2 6301482620 BLOCK 1 846C--010-002 21 1G471 1 3 6301482538 BLOCK 1 846C--010-003 21 …
MODEL EG-100
0609-001
12
5
4
38
1
2
3
34
.
39
.
40
4
38
4
38
4
38
37
37
6
7
9
8
10
For Standard
For BGA
For Middle Size Odd-shaped
For Multi-Functional
テーブル部
TABLE SECTION
Fig. C-1
テーブル部
Table Section
MODEL EG-100
1004-003
13
Key No. PART No. PART NAME Q’ty REMARKS New Code
NOTE
1 6301471891 PLATE,LOCATE 3 846C--010-001 216H0458
2 6301482620 BLOCK 1 846C--010-002 211G4711
3 6301482538 BLOCK 1 846C--010-003 211G4706
4 6301433660 PLUNGER 4 846C--010-004 226G0057
5 6301482552 BLOCK 1 846C--010-005 211G4707
6 6301488967 BLOCK 1 846C--010-006 211G4756
7 6301482613 BLOCK 1 846C--010-007 211G4710
8 6301472263 NOZZLE 1 846C--010-008 216M2532
9 6301482606 BLOCK 1 846C--010-009 211G4709
10 6301491790 ASSY,HOLDER 1 846C--010-010 016B0092
34 6300007664 BOLT,HEX-SCT 3 846C--010-034 221A0021
37 6300008913 SET SCREW 4 846C--010-037 221C0004
38 4111410505 NUT HEX 5 4 846C--010-038 221F0085
39 4111412905 WASHER SPR 4 3 846C--010-039 221H0284
40 4111414008 WASHER V 4X9X0.8 3 846C--010-040 221H0315
C-1
MODEL EG-100
0609-001
14
135
135
136
141
.
142
.
143
132
130
131
154
133
152
151
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TABLE SECTION
Fig. C-2
真空ポンプ
Vacuum Pump