RX-7-Rev07PDF - 第4页
A-1 A 1 X フレ ーム ASSY 左 X frame as sy - Left
B1. 主電源・タッチパネル配線図/Main power supply wiring diagram ................................ B-1
B2. 電装 BOX 配線-1/Electrical box wiring diagram - 1 ........................................................ B-3
B3. 電装 BOX 配線-2/Electrical box wiring diagram - 2 ........................................................ B-5
B4. 電装 BOX 配線-3/Electrical box wiring diagram - 3 ........................................................ B-7
B5. 電装 BOX 配線-4/Electrical box wiring diagram - 4 ........................................................ B-9
B6. 電装 BOX 配線-5/Electrical box wiring diagram - 5 ...................................................... B-11
B7. 電装 BOX 配線-6/Electrical box wiring diagram - 6 ...................................................... B-13
B8. PC 配線/PC wiring diagram ......................................................................................... B-15
B9. サーボモーター配線-左ヘッド/Wiring diagram servo motor - Left ............................. B-17
B10. サーボモーター配線-右ヘッド/Wiring diagram servo motor - Right ........................... B-20
B11. ヘッド吸装着・真空ポンプ配線/Wiring diagram Head/Pump ..................................... B-23
B12. ヘッド LED・バルブモーター配線-左ヘッド/Wiring diagram Head LEFT ................. B-25
B13. ヘッド LED・バルブモーター配線-右ヘッド/Wiring diagram Head RIGHT ............... B-27
B14. 部品カメラ配線-左ヘッド/Wiring diagram camera LEFT ............................................ B-29
B15. 部品カメラ配線-右ヘッド/Wiring diagram camera RIGHT ......................................... B-31
B16. P8 ヘッド配線/Wiring diagram P8 Head ..................................................................... B-33
B17. XY スケールユニット・Y リニアモーター配線-左/Wiring diagram XY unit LEFT ...... B-35
B18. XY スケールユニット・Y リニアモーター配線-右/Wiring diagram XY unit RIGHT .... B-37
B19. コンベア・バックアップモーター配線/Wiring diagram motor unit ............................. B-39
B20. コンベア配線-1/Wiring diagram Conveyor - 1 ............................................................. B-41
B21. コンベア配線-2/Wiring diagram Conveyor - 2 ............................................................. B-43
B22. コンベア配線-3/Wiring diagram Conveyor - 3 ............................................................. B-45
B23. コンベア配線-4/Wiring diagram Conveyor - 4 ............................................................. B-47
B24. コンベア配線-5/Wiring diagram Conveyor - 5 ............................................................. B-49
B25. I/O 配線-1/Wiring diagram I/O - 1 ................................................................................ B-51
B26. I/O 配線-2/Wiring diagram I/O - 2 ................................................................................ B-53
B27. I/O 配線-3/Wiring diagram I/O - 3 ................................................................................ B-55
B28. IFS-NX 配線/System diagram IFS-NX ......................................................................... B-57
B29. RF フィーダ用 台車配線図/Wiring diagram Trolley for RF feeder ............................... B-59
B30. ISLITE (ISM/MES 連携)配線図/ System diagram ISLITE (ISM/MES Cooperation) .... B-61
C1. 全体配管図/Pipe diagram.............................................................................................. C-1
C2. ヘッド部配管図/Head pipe diagram ............................................................................. C-5
C3. 搬送部周辺配管図/Conveyor pipe diagram................................................................... C-7
保証範囲について/Disclaimer
A-1
A1
X フレーム ASSY 左
X frame assy - Left
A-2
A1
X フレーム ASSY 左
X frame assy - Left
ｲﾗｽﾄ番号
Ref.No.
品番
Part Number
Description
品名
個数
Q'ty
備考
Remarks
1 EZX-2586-586-2 HEATSINK ASSY ﾋ-ﾄｼﾝｸ ASSY 1
2 EZ1-492-149-11 DRIVER, PULSE MOTOR ﾊﾟﾙｽ ﾓ-ﾀ ﾄﾞﾗｲﾊﾞ (AU9284N1) 1
3 EZ1-492-200-21 FAN ASSY (Y) FAN ASSY (Y ｼﾞｸ) L 1
4 EZ1-492-231-23 MOTOR ASSY (Y)
ﾓ-ﾀ ASSY (Y) L
1
5 EZ1-492-235-25 MOTOR ASSY (Z)
ﾓ-ﾀ ASSY (Z) L
1
6 EZ1-492-237-23 SCALE ASSY (X)
ｽｹ-ﾙ ASSY (X) L
1
7 EZ1-492-245-11 UNIT,CAMERA PC BOARD(TS-479-*) ｷﾊﾞﾝ ｶﾒﾗ ﾕﾆﾂﾄ (TS-479-100) 1
8 EZ1-855-265-11 MOTOR, SERVO (HG-KR23) ｻ-ﾎﾞ ﾓ-ﾀ (HG-KR23) 1
9 EZ2-580-592-01 SCREW, +PSW M3X8 SCREW, +PSW M3X8 4
10 EZ4-454-731-01 LINEAR ROLLERWAY (MXSG15C1R440)
ﾘﾆｱ ﾛ-ﾗ- ｳｴｲ (MXSG15C1R440)
1
11 EZ4-454-733-01 BEARING (7000), ANGULAR
ｱﾝｷﾞﾕﾗ ﾍﾞｱﾘﾝｸﾞ (7000)
1
12 EZ4-454-734-01 BELT (275-EV5GT-12), TIMING
ﾀｲﾐﾝｸﾞ ﾍﾞﾙﾄ (275-EV5GT-12)
1
13 EZ4-454-735-01 LOCK (MC-8-19), MECHANICAL ﾒｶ ﾛﾂｸ (MC-8-19) 1
14 EZ4-454-736-01 LOCK (MC-14-26), MECHANICAL ﾒｶ ﾛﾂｸ (MC-14-26) 1
15 EZ4-454-738-01 BEARING (MTA06-15), ANGULAR ｱﾝｷﾞﾕﾗ ﾍﾞｱﾘﾝｸﾞ (MTA06-15) 1
16 EZ4-454-739-02 LINEAR WAY (MLC9C2R180)
ﾘﾆｱｳｴｲ (MLC9C2R180)
2
17 EZ4-454-740-01 SCREW (BLK0606S-3G1), BALL
ﾎﾞ-ﾙ ﾈｼﾞ (BLK0606S-3G1)
1
18 EZ4-454-741-01 COUPLING (SFC-010SA2-5B-5B)
ｶﾂﾌﾟﾘﾝｸﾞ (SFC-010SA2-5B-5B)
1
19 EZ4-454-946-01 X PULLEY X ﾌﾟ-ﾘ 1
20 EZ4-454-947-01 PULLEY, X DRIVING X ｸﾄﾞｳ ﾌﾟ-ﾘ- 1
21 EZ4-455-207-02 GREASE COVER (X, A) ｸﾞﾘｽ ｶﾊﾞ- (X, A) 1
22 EZ4-455-208-02 GREASE COVER (X, B)
ｸﾞﾘｽ ｶﾊﾞ- (X, B)
1
23 EZ4-455-209-02 STOPPER (X, S)
ｽﾄﾂﾊﾟ- (X, S)
2
24 EZ4-455-210-01 COLLAR, HEAT INSULATING
ﾀﾞﾝﾈﾂ ｶﾗ-
10
25 EZ4-455-211-01 WASHER, HEAT INSULATING ﾀﾞﾝﾈﾂ ﾜﾂｼﾔ 10
26 EZ4-455-238-12 BEARING HOLDER (X, F) ﾍﾞｱﾘﾝｸﾞ ﾎﾙﾀﾞ- (X, F) 1
27 EZ4-455-239-01 MOTOR BRACKET (X) ﾓ-ﾀ- ﾌﾞﾗｹﾂﾄ (X) 1
28 EZ4-455-241-01 BEARING RETAINER (X)
ﾍﾞｱﾘﾝｸﾞ ｵｻｴ (X)
1
29 EZ4-455-242-02 TENSION PLATE (X)
ﾃﾝｼﾖﾝ ﾌﾟﾚ-ﾄ (X)
1
30 EZ4-455-248-04 X FRAME (L)
X ﾌﾚ-ﾑ (L)
1
31 EZ4-455-277-02 HOLDER (Z), BEARING ﾍﾞｱﾘﾝｸﾞ ﾎﾙﾀﾞ- Z 1
32 EZ4-455-279-02 BRACKET, MOTOR ﾓ-ﾀ- ﾌﾞﾗｹﾂﾄ 1
33 EZ4-455-283-02 RETAINER, BEARING ﾍﾞｱﾘﾝｸﾞ ｵｻｴ 1
34 EZ4-455-284-01 HOLDER, NUT (Z)
ﾅﾂﾄ ﾎﾙﾀﾞ- (Z)
1
35 EZ4-455-285-03 Z FRAME (L)
Z ﾌﾚ-ﾑ (L)
1
36 EZ4-455-293-01 URETHANE STOPPER, Z
Z ｳﾚﾀﾝ ｽﾄﾂﾊﾟ-
4
37 EZ4-455-294-01 COLLAR, Z STOPPER Z ｽﾄﾂﾊﾟ- ｶﾗ- 4
38 EZ4-455-668-01 FAN, BRACKET FAN ﾌﾞﾗｹﾂﾄ 1
39 EZ4-455-670-02 FAN, DUCT FAN ﾀﾞｸﾄ 1
40 EZ4-461-729-01 COLLAR (FWSSB-D17-V14-T5)
ｶﾗ- (FWSSB-D17-V14-T5)
1
41 EZ4-461-775-01 COVER (LZ, L), GREASE
ｸﾞﾘｽ ｶﾊﾞ- (LZ, L)
1
42 EZ4-461-776-01 COVER (LZ, R), GREASE
ｸﾞﾘｽ ｶﾊﾞ- (LZ, R)
1
43 EZ4-463-629-01 NUT (Z), BEARING ﾍﾞｱﾘﾝｸﾞ ﾅﾂﾄ (Z) 1
44 EZ4-466-199-01 ARM , CABLE GUIDE (L) ｹ-ﾌﾞﾙ ｶﾞｲﾄﾞ ｱ-ﾑ (L) 1
45 EZ4-467-281-01 BALL SCREW NUT HOLDER (X, L) ﾎﾞ-ﾙﾈｼﾞ ﾅﾂﾄ ﾎﾙﾀﾞ- (X, L) 1
46 EZ4-467-284-01 BEARING HOLDER (X, S)
ﾍﾞｱﾘﾝｸﾞ ﾎﾙﾀﾞ- (X, S)
1
47 EZ4-467-686-01 GREASE COVER (X, BT)
ｸﾞﾘ-ｽ ｶﾊﾞ- (X, BT)
1
48 EZ4-467-695-01 COLLAR (X), STOPPER
ｽﾄﾂﾊﾟ- ｶﾗ- (X)
4
49 EZ4-468-933-01 SCREW (SDA1520), BALL ﾎﾞ-ﾙ ﾈｼﾞ (SDA1520) 1
50 EZ4-700-061-01 BEARING (6000ZZ) ﾍﾞｱﾘﾝｸﾞ (6000ZZ) 1
51 EZ4-705-584-11 SPACER (SQ-10) ｽﾍﾟ-ｻ (SQ-10) 4
52 EZ4-706-151-11 CLAMP (KR5G5)
ﾊｲｾﾝﾄﾞﾒ (KR5G5)
1
53 EZ4-761-803-11 NUT, FINE U (TREATMENT HAVE)
ﾌｱｲﾝ U ﾅﾂﾄ (ｼﾖﾘ ｱﾘ) (FU00SS)
1
54 EZ7-623-208-22 SW 3,TYPE 2
SW 3,TYPE 2
2