1OM-1625-004_w.pdf - 第176页
1OM-1603 1007-003 4-A Chapter 4 Basic Information This chapter describes the basic information. 1.Specications 2. List of V acuum Nozzle T ypes 3. Measured Noise V alue
1OM-1603
3-52
6. Running-In Operation : Chap.3
1
Select the pattern
3
Determine the pattern
2
Select the operation
F1C45
(5) Press the [START] button twice on the operation panel.
(The running-in operation starts.)
(6) To stop the running-in operation, press the [STOP] button on the operation
panel.
(7) To exit from the test mode, press the [Disable] and the [Apply] buttons in the
"MODE SET" window.
("TEST RUN: # (Pattern No.)" disappears from the "Status Indicator" eld
located at the upper area of the window and the normal mode resumes.)
1012-005
1OM-1603
1007-003 4-A
Chapter 4
Basic Information
This chapter describes the basic information.
1.Specications
2. List of Vacuum Nozzle Types
3. Measured Noise Value
1OM-1603
0908-002 4-B