P-310-004(1_2) - 第356页

Fig. G2-4 エア配管 Air Piping 0912-002 M-3ALU-4 CDUJB10-8S-F8NS KQ2UD04-06 KQP-04 KQ2L08-01S JNU6 From Main Body Stocker Up/Down 362 361 363 363 See Fig. G2-3 Key No.240 See Fig. G2-2 Key No.101 Fig. G2 高速ノズルストッカ部 HIGH SPPED…

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

239 0919I00E CAST BASE 2 2 1 1 109190800A-039

240 09198101 ASSY_VALVE 2 2 1 1

109190800A-040

241 225B0393 AIR LINE EQPT 2 2 1 1

109190800A-041

242 225B0085 AIR LINE EQPT 2 2 1 1

109190800A-042

243 225B0502 AIR LINE EQPT 2 2 1 1

109190800A-043

247 221AA025 ROHS:BOLT_HEX-SCT 4 4 2 2

M4L40 109190800A-047

248 221HA004 WASHER 6 6 3 3

SW4 109190800A-048

249 221HA104 WASHER 6 6 3 3

FW4 109190800A-049

250 221AA023 ROHS:BOLT_HEX-SCT 2 2 1 1

M4L30 109190800A-050

251 225F0713 PIPE FITTINGS 6 6 3 3

109190800A-051

Fig. G2

1104-004

Fig. G2-3

SIGMA-G5SA

SIGMA-G5SB

SIGMA-G5SC

SIGMA-G5SD

UNIT-6

Fig. G2

STOCKER 1

Fig. G2-4

エア配管

Air Piping

0912-002

M-3ALU-4

CDUJB10-8S-F8NS

KQ2UD04-06

KQP-04

KQ2L08-01S

JNU6

From Main Body

Stocker Up/Down

362

361

363

See Fig. G2-3

Key No.240

See Fig. G2-2

Key No.101

Fig. G2

高速ノズルストッカ部

HIGH SPPED NOZZLE STOCKER SECTION

UNIT-6

Fig. G2

STOCKER 1

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

361 0919I00H TUBE D8 2 2 1 1 309190800G-001

362 0919I00J TUBE D6 2 2 1 1

309190800G-002

363 0919I00K TUBE D4 2 2 1 1

309190800G-003

Fig. G2

1007-003

Fig. G2-4

SIGMA-G5SA

SIGMA-G5SB

SIGMA-G5SC

SIGMA-G5SD

UNIT-6

Fig. G2

STOCKER 1