M10_LE7-cwd - 第23页
Confidential & P roprietary P A G E P3 SQ9 SQ10 1 2 3 4 5 6 PA6pin 24V 24V BL BR BK BL BR BK X OT- X OT+ LC2-M65 4R-000 EE-SX9 11P-R EE-SX9 11P-R EE-SX9 11P-R GND GND 12 11 10 9 8 7 6 5 4 3 2 1 PAD12pi n 24V 24V 24V …

Confidential & Proprietary
PAGE
3
2
1
4
GND
GND
VACUUM BREAK1
VACUUM1
R
BK
YV1
5
6
7
8
GND
GND
VACUUM2
VACUUM BREAK2
R
BK
YV2
9 R
BK
10
11
12
R
BK
R
BK
R
BK
BL
BR
BK
PAD16pin
3
2
1
24V
GND
HEAD1 PRESS
BL
BR
BK
3
2
1
24V
GND
BL
BR
BK
3
2
1
24V
GND
HEAD2 PRESS
HEAD3 PRESS
GND
GND
VACUUM3
VACUUM BREAK3
PAD16pin
PAD16pin
PA3pin
PA3pin
PA3pin
YV3
X10
X11
X12
X7
X7
X7
P3
GND
GND
13
14
15
16
VACUUM4
VACUUM BREAK4
PAD16pin
3
2
1
24V
GND
HEAD4 PRESS
PA3pin
X13
GND
GND
3
2
1
24V
GND
PA3pin
GND
GND
3
2
1
24V
GND
PA3pin
X14
X15
X8
X8
HEAD5 PRESS
VACUUM5
VACUUM BREAK5
HEAD6 PRESS
VACUUM BREAK6
VACUUM6
1
2
3
4
5
6
7
8
X7
PAD10pin
9
10
-
-
PAD10pin
P3
XiO.Hi11 Rev.B XiO.Hi11 Rev.B
LE6-M71H6-03x
LE6-M71A2-00x
LE6-M71A2-00x
LE6-M71A2-00x
LE6-M66X4-00x
LE6-M66X4-00x
LE6-M71H6-03x
R
BK
YV4
R
BK
BL
BR
BK
LE6-M71A2-00x
LE6-M65H8-00xLE6-M65H8-00x
CN4.
19
Hi(6) 4Z-4T
M10

Confidential & Proprietary
PAGE
P3
SQ9
SQ10
1
2
3
4
5
6
PA6pin
24V
24V
BL
BR
BK
BL
BR
BK
X OT-
X OT+
LC2-M654R-000
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
GND
GND
12
11
10
9
8
7
6
5
4
3
2
1
PAD12pin
24V
24V
24V
24V
Z1 OT+
Z2 OT+
Z3 OT+
Z4 OT+
GND
GND
GND
GND
4
3
2
1
24V
24V
GND
GND
Z5 OT+
Z6 OT+
PAD6pin
X20
X19
X18
5
6
1
2
3
PA6pin
24V
BK
R
YL
FAN1 LOCK
FAN12
GND
□80-T25
X2
4
5
6
24V
FAN2 LOCK
GND
3
2
1
4
5
6
7
8
9
10
PAD10pin
GND
GND
GND
GND
24V
24V
RESERVE
X3
P3
SQ5
SQ6
SQ7
SQ8
BL
BR
BK
BL
BR
BK
BL
BR
BK
BL
BR
BK
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
BL
BR
BK
EE-SX911P-R
BL
BR
BK
EE-SX911P-R
SQ73
SQ74
XiO.Hi11 Rev.B XiO.Hi11 Rev.B
LE6-M71H6-03x
LE6-M65EA-10x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LE6-M65EA-20x
LC2-M654R-00x
LC2-M654R-00x
RESERVE_DI0
RESERVE_DI1
RESERVE_DO0
RESERVE_DO1
LE6-M65A4-00x
LE6-M6548-00x
LC2-M654R-00x
LC2-M654R-00x
LE6-M65E9-00x
LE6-M71H6-03x
CN4.
20
Hi(7) 6Z-2T
M10

Confidential & Proprietary
PAGE
3
2
1
4
GND
GND
VACUUM BREAK1
VACUUM1
R
BK
YV1
5
6
7
8
GND
GND
VACUUM2
VACUUM BREAK2
R
BK
YV2
9 R
BK
10
11
12
R
BK
R
BK
R
BK
BL
BR
BK
PAD16pin
3
2
1
24V
GND
HEAD1 PRESS
BL
BR
BK
3
2
1
24V
GND
BL
BR
BK
3
2
1
24V
GND
HEAD2 PRESS
HEAD3 PRESS
GND
GND
VACUUM3
VACUUM BREAK3
PAD16pin
PAD16pin
PA3pin
PA3pin
PA3pin
YV3
X10
X11
X12
X7
X7
X7
P3
GND
GND
13
14
15
16
VACUUM4
VACUUM BREAK4
PAD16pin
3
2
1
24V
GND
HEAD4 PRESS
PA3pin
X13
GND
GND
3
2
1
24V
GND
PA3pin
GND
GND
3
2
1
24V
GND
PA3pin
X14
X15
X8
X8
HEAD5 PRESS
VACUUM5
VACUUM BREAK5
HEAD6 PRESS
VACUUM BREAK6
VACUUM6
1
2
3
4
5
6
7
8
X7
PAD10pin
9
10
-
-
PAD10pin
P3
XiO.Hi11 Rev.B XiO.Hi11 Rev.B
LE6-M71H6-03x
LE6-M71A2-60x
LE6-M71A2-60x
LE6-M71A2-60x
LE6-M71H6-03x
R
BK
YV4
R
BK
BL
BR
BK
R
BK
R
BK
BL
BR
BK
R
BK
R
BK
BL
BR
BK
YV29
YV30
LE6-M71A2-60x
LE6-M71A2-60x
LE6-M71A2-60x
LE6-M65H8-10xLE6-M65H8-10x
CN4.
21
Hi(8) 6Z-2T
M10