YSH20_Ope_E - 第57页
Chapter 2 Basic operation Contents 1 1.1 Canceling emergency stop 2- 1 1.2 Clearing an error 2- 2 1.3 Typical err ors and troubleshooting 2- 3 8 …
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Part names and functions
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Axis configuration of wafer tray changer
Plus direction
Minus direction
Axis configuration
Wafer tray changer
LCX axis
LFX axisLFX axis
LCY axis
LZ axis
LH axisLH axis
LP1 axis
LR1 axis
LP2 axis
LR2 axis
LA axis
LE axis
LU1 axis
LU2 axis
LY axis
LX axis
Front of machine
23124-H0-00
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Function of each axis
Axis Function
LZ Moves the magazine vertically.
LH Extracts a wafer from the tray changer and sets it on this machine.
LY Moves a wafer in the Y direction on this machine.
LX Moves the push-up pin unit in the X direction.
LCX Moves the wafer camera in the X direction.
LCY Moves the wafer camera and wafer pickup head in the Y direction.
LU1, LU2 Moves the push-up pin vertically.
LE Extends the dicing sheet to apply tension to it.
LFX Moves the wafer pickup head in the X direction.
LP1, LP2 Moves up or down when the wafer pickup head picks up a wafer.
LR1, LR2 Turns the two wafer pickup heads.
LA Turns a wafer.
Chapter 2 Basic operation
Contents
1
1.1 Canceling emergency stop 2-1
1.2 Clearing an error 2-2
1.3 Typical errors and troubleshooting 2-3
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2.2 Setup screen 2-11
2.3 Unit screen 2-13
3. Starting and stopping the machine 2-18
3.1 Pre-operation check 2-19
3.2 Starting the machine 2-20
3.3 Warming up the machine 2-22
3.4 Conveyor unit setup flow 2-23
4. Preparing the component supply unit 2-25
4.1 Tape feeders 2-25
4.1.1 Setting the tape 2-25
4.1.2 Setting a tape feed pitch 2-30
4.1.3 Installation on the machine 2-34
4.2 Wafer tray changer 2-35
4.2.1 Setting a dicing frame (components) in the tray. 2-35
4.2.2 Setting the components in the magazine 2-36
4.2.3 Exchanging the magazine and supplying components 2-37
4.2.4 Teaching the wafer component positions 2-39
4.2.5 Exchanging the expander unit and pallet clamp 2-45
5. Settings on the machine side 2-48
5.1 Setting the "Package" parameter. 2-48
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2-1
2
asic operation
1. Before operation
The following explains how to cancel emergency stop and clear errors. Read before operating the machine.
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Cautions during machine operation
• Do not turn off the compressed air during operation. If the servo-control section is operated without supplying the
compressed air, the machine may be damaged since the pneumatic devices are not correctly controlled.
• Before beginning maintenance work, always make sure that no air pressure remains in air cylinders.
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Cautions during power outages
If a power outage (blackout) occurs during automatic machine operation, always turn the main power switch off to
prevent faulty operation or machine damage after power has been restored. Also remove the boards that remain in the
machine.
1.1 Canceling emergency stop
Follow these steps to cancel emergency stop.
1
Release the emergency stop button.
When the emergency stop button is pressed, turn it clockwise to release it.
2
Check safety.
Before continuing the procedure, check the surrounding area for safety.
3
Press the [READY] button.
Pressing the [READY] button on the operation panel turns on the servomotors.
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[READY] button
Press this button to turn the servo ON.
23200-H0-00
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Check the signal light and screen display.
Check that the red lamp of the signal light is off and the emergency stop sign on the top left (status
area) of the operation screen is now off.