DF01-Rev02 - 第24页

- - 11. RE VE RSA L UNIT 6 7 7 1 3 1 3 1 5 9 1 6 1 8 2 0 2 1 2 4 2 4 2 6 2 7 2 7 2 8 3 0 3 7 3 8 5 2 4 0 1 4 1 4 2 3 3 3 6 4 4 4 3 3 3 9 3 9 4 5 4 6 4 7 2 6 4 8 4 9 5 0 5 1 5 2 5 3 5 4 5 5 2 9 1 2 5 6 5 6 1 9 2 5 1 4 4…

100%1 / 64
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REF.NO NOTE PART NO D E S C R I P T I O N Qty
1 401-24052 SHUTTLE STAGE 1
2 401-24053 SHUTTLE STAGE BLOCK 1
3 401-24054 SHUTTLE BEAR MOUNT 1
4 401-24055 SHUTTLE LEG 1
5 401-24056 MULTI CONNECTOR ATTACHMENT PLATE 1
6 401-24057 ADSORPTION PIPE 1.7 6
7 401-24058 ADSORPTION PIPE GUIDE 4
8 401-24059 SHUTTLE U BLOCK 1
9 401-24060 SHUTTLE COVER 1
10 401-24061 DUST BOX 1
11 - SCREW M3X6 4
12 401-24063 ACTUATOR 1
13 401-21305 PHOTO SENSOR 3
14 401-21300 AC SERVO MOTOR 1
15 401-24064 CABLEVEYOR 1
16 401-24065 ATTACHMENT METAL FITTING 1
17 401-24066 ATTACHMENT METAL FITTING 1
18 401-24067 MULTI CONNECTOR 1
19 401-24068 MINIATURE ELBOW 6
20 - SCREW M4X6 8
21 - SCREW M4X6 4
22 401-24071 COUPLING 1
23 401-24072 COMPRESSION SPRING 6
24 401-24073 LINEAR BUSHING 6
25 - E-RING 6
26 - BOLT M6X25 2
27 - WASHER M6 2
28 - SCREW M5X12 2
29 - BOLT M6X12 2
30 - WASHER M6 2
31 - SCREW M4X14 2
32 - SCREW M5X10 4
33 - SCREW M3X6 8
34 - SCREW M4X30 4
35 - SCREW M4X15 4
36 - SCREW M5X12 2
37 - WASHER M5 2
38
#01
401-23157 RUBBER TIP 6
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11. REVERSAL UNIT
6
7
7
1 3
1 3
1 5
9
1 6
1 8
2 0
2 1
2 4
2 4
2 6
2 7
2 7
2 8
3 0
3 7
3 8
5
2
4 0
1
4 1
4 2
3 3
3 6
4 4
4 3
3
3 9
3 9
4 5
4 6
4 7
2 6
4 8
4 9
5 0
5 1
5 2
5 3
5 4
5 5
2 9
1 2
5 6
5 6
1 9
2 5
1 4
4
5 7
5 8
5 9
3 5
3 4
1 1
1 0
1 7
1 7
A
A
B
B
C
C
4 8
1 5
3 4
2 2
3 2
3 1
2 3
3 1
3 2
2 3
3 2
3 1
8
8
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REF.NO NOTE PART NO D E S C R I P T I O N Qty
1 401-24109 ROTATION DOGS 1
2 401-24110 TURN SENSOR BLOCK 1
3 401-24111 TURN TABLE 1
4 401-24112 TURN NUT CASE 1
5 401-24113 TURN PULLEY 1
6 401-24114 TURN BASE 1
7
#01
401-24115 TURN LINEAR MOUNT 1
8 - SCREW M1.6X5 14
9 401-24117 TURN SUPPORT PLATE LARGE 1
10 401-24118 TURN SUPPORT PLATE SMALL 1
11 401-24119 TURN VERTICAL SENSOR DOGS 1
12 401-24120 TURN VERTICAL MOTOR MOUNT 1
13 401-24121 STENCIL WEIGHT 2
14 401-24122 TURN BALLSCREW 1
15 401-24123 RETAINING RINGS C TYPE 2
16 401-24124 TIMING PULLEY 1
17 - SCREW M3X8 8
18 401-23972 TIMING PULLEY 1
19 401-23973 TIMING PULLEY 1
20 401-23149 TIMING BELT 1
21 401-23150 TIMING BELT 1
22 401-24445 M9 SENSOR ASM 1
23 401-24448 M10 SENSOR ASM 1
24 401-24128 SHAFT 3
25 401-24129 SUPPORT UNIT 1
26 401-24130 BEARING 2
27 401-24131 GUIDE RAIL 2
28 401-24444 M9 MOTOR ASM 1
29 401-24447 M10 MOTOR ASM 1
30 401-24134 POROUS CHUCK 1
31 - SCREW M2X8 4
32 - WASHER M2 4
33 401-24136 ROTARY JOINT 1
34 - SCREW M4X18 8
35 - SCREW M5X20 2
36 - WAVE WASHER 1
37 - SCREW M3X8 2
38 - WASHER M3 2
39 - SCREW M3X12 4
40 - SCREW M3X8 2
41 - SCREW M2.5X6 2
42 - WASHER M2.5 2
43 - SCREW M3X16 2
44 - WASHER M3 2
45 - SCREW M2.5X10 4
46 - SPRING WASHER M2.5 4
47 - WASHER M2.5 4
48 - SCREW M3X12 14
49 - BOLT M6X30 2
50 - SPRING WASHER M6 2
51 - WASHER M6 2
52 - SCREW M3X10 4
53 - SCREW M4X25 2
54 - SPRING WASHER M4 2
55 - WASHER M4 2
56 - SCREW M2.5X3 4
57 - SCREW M4X12 2
58 - SCREW M3X12 3
59 - WASHER M3 3