YSP20 - 第3页

3. Moving-axis Section 4. Head Section 4. Head Section 5. Cleaner Section

1. Base Section 2. Cover Section

2. Cover Section

3. Moving-axis Section

3. Moving-axis Section 4. Head Section

4. Head Section

5. Cleaner Section

6. Mask Table Section

6. Mask Table Section 7. Camera Section

8. Conveyor Unit Section