V4_MPL.pdf - 第10页
V4 Maintenance Parts List 5.XY-Axis NO. CODE PARTS NAME REMARK 1 LC5-M25A2-A00 XY STAGE,L1 L1 Head 2 LC5-M25A2-E00 XY STAGE,L2 L2 Head 3 LC5-M25A2-F00 XY STAGE,L3 L3 Head 4 LC5-M25A2-H00 XY STAGE,L4 L4 Head 5 LC5-M25A2-J…
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4.Y-Axis
V4 Maintenance Parts List
5.XY-Axis
NO. CODE PARTS NAME REMARK
1 LC5-M25A2-A00 XY STAGE,L1 L1 Head
2 LC5-M25A2-E00 XY STAGE,L2 L2 Head
3 LC5-M25A2-F00 XY STAGE,L3 L3 Head
4 LC5-M25A2-H00 XY STAGE,L4 L4 Head
5 LC5-M25A2-J00 XY STAGE,R1 R1 Head
6 LC5-M25A2-K00 XY STAGE,R2 R2 Head
7 LC5-M25A2-L00 XY STAGE,R3 R3 Head
8 LC5-M25A2-M00 XY STAGE,R4 R4 Head
9 LC5-M25E1-A10 XY STAGE,L1 L1 Head for 350N・180N
10 LC5-M25E1-B10 XY STAGE,L2 L2 Head for 350N・180N
11 LC5-M25E1-C10 XY STAGE,L3 L3 Head for 350N・180N
12 LC5-M25E1-D10 XY STAGE,L4 L4 Head for 350N・180N
13 LC5-M25E1-E10 XY STAGE,R1 R1 Head for 350N・180N
14 LC5-M25E1-F10 XY STAGE,R2 R2 Head for 350N・180N
15 LC5-M25E1-G10 XY STAGE,R3 R3 Head for 350N・180N
16 LC5-M25E1-H10 XY STAGE,R4 R4 Head for 350N・180N
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5.XY-Axis