V4_MPL.pdf - 第19页
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V4 Maintenance Parts List
9.TRAY STOCKER
NO. CODE PARTS NAME REMARK
1 LC5-M31K1-101 SENSOR ASSY.O Stocker1 Hook OPEN
2 LC5-M31K2-101 SENSOR ASSY.C Stocker1 Hook CLOSE
3 LC5-M31K3-103 SENSOR ASSY.FULL Stockre1 Tray FULL
4 LC5-M31KA-101 VALVE ASSY. Stocker1 Hook Valve
5 LC5-M31K1-201 SENSOR ASSY.O Stocker2 Hook OPEN
6 LC5-M31K2-201 SENSOR ASSY.C Stocker2 Hook CLOSE
7 LC5-M31K3-203 SENSOR ASSY.FULL Stockre2 Tray FULL
8 LC5-M31KA-201 VALVE ASSY. Stocker2 Hook Valve
9 LC5-M31K1-301 SENSOR ASSY.O Stocker3 Hook OPEN
10 LC5-M31K2-301 SENSOR ASSY.C Stocker3 Hook CLOSE
11 LC5-M31K3-303 SENSOR ASSY.FULL Stockre3 Tray FULL
12 LC5-M31KA-301 VALVE ASSY. Stocker3 Hook Valve
13 LC5-M31K1-401 SENSOR ASSY.O Stocker4 Hook OPEN
14 LC5-M31K2-401 SENSOR ASSY.C Stocker4 Hook CLOSE
15 LC5-M31K3-403 SENSOR ASSY.FULL Stockre4 Tray FULL
16 LC5-M31KA-401 VALVE ASSY. Stocker4 Hook Valve
17 LC5-M31K1-501 SENSOR ASSY.O Stocker5 Hook OPEN
18 LC5-M31K2-501 SENSOR ASSY.C Stocker5 Hook CLOSE
19 LC5-M31K3-503 SENSOR ASSY.FULL Stockre5 Tray FULL
20 LC5-M31KA-501 VALVE ASSY. Stocker5 Hook Valve
21 LC5-M31K1-601 SENSOR ASSY.O Stocker6 Hook OPEN
22 LC5-M31K2-601 SENSOR ASSY.C Stocker6 Hook CLOSE
23 LC5-M31K3-603 SENSOR ASSY.FULL Stockre6 Tray FULL
24 LC5-M31KA-601 VALVE ASSY. Stocker6 Hook Valve
25 LC5-M31K1-701 SENSOR ASSY.O Stocker7 Hook OPEN
26 LC5-M31K2-701 SENSOR ASSY.C Stocker7 Hook CLOSE
27 LC5-M31K3-703 SENSOR ASSY.FULL Stockre7 Tray FULL
28 LC5-M31KA-701 VALVE ASSY. Stocker7 Hook Valve
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9.TRAY STOCKER
V4 Maintenance Parts List
10.HEAD
NO. CODE PARTS NAME REMARK
1 LC4-M28AB-000 E-T REGULATOR Pressure Controll Head
2 LC5-M7CK1-100 VALVE ASSY. L1 QFP Head L1 Valve
3 LC5-M7CK1-200 VALVE ASSY. L2 QFP Head L2 Valve
4 LC5-M7CK1-300 VALVE ASSY. L3 QFP Head L3 Valve
5 LC5-M7CK1-400 VALVE ASSY. L4 QFP Head L4 Valve
6 LC5-M7CK1-500 VALVE ASSY. R1 QFP Head R1 Valve
7 LC5-M7CK1-600 VALVE ASSY. R2 QFP Head R2 Valve
8 LC5-M7CK1-700 VALVE ASSY. R3 QFP Head R3 Valve
9 LC5-M7CK1-800 VALVE ASSY. R4 QFP Head R4 Valve
10 LC5-M7BK1-100 SENSOR,L1 Press&QFP Head L1 Nozzle UP
11 LC5-M7BK1-200 SENSOR,L2 Press&QFP Head L2 Nozzle UP
12 LC5-M7BK1-300 SENSOR,L3 Press&QFP Head L3 Nozzle UP
13 LC5-M7BK1-400 SENSOR,L4 Press&QFP Head L4 Nozzle UP
14 LC5-M7BK1-500 SENSOR,R1 Press&QFP Head R1 Nozzle UP
15 LC5-M7BK1-600 SENSOR,R2 Press&QFP Head R2 Nozzle UP
16 LC5-M7BK1-700 SENSOR,R3 Press&QFP Head R3 Nozzle UP
17 LC5-M7BK1-800 SENSOR,R4 Press&QFP Head R4 Nozzle UP
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