SussPA300UserGuide - 第16页
SUSS / PA300 / User Manual / M10-121841-00 / February 2002 15 3.3.2 Compressed Air Filtered, dry and oil free air of at least 0.4 MPa or 4 bar up to 1 MPa or 10 bar; flow rate is insignificant. System Input U.S. installa…
14
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
3.1.2 Noise Level
Measured equipment
PA300, standard
Experiment conditions,
equipment
Mechanical stage, standard
Measuring conditions,
measuring device
Noise level measuring device SL4001/2
Accuracy class 3
Measured in operating position
Results
Constant level: 56 dB (A)
Impulse: 72 dB (A)
3.1.3 RF Frequencies, Electrostatic Discharge and Non-Ionizing
Radiation
This equipment does not produce dangerous electromagnetic radiation, electromagnetic
interference, radio frequency, acoustical vibrations or electrostatic discharge.
The PA300 system is class A equipment and is designed for use in industry.
It can in non-industrial areas, however, cause radio interference but there is no need to
act on it. During normal operation the rays create no special risks. Disturbances can
be a positional problem. If this does occur, it is expected that the customer will carry
out any suitable measures and bare the cost.
Interference to the video system screen through electromagnetic radiation does not
influence the movement of the mechanical stage. During operation or service the user
should avoid touching unearthed contacts. In equipment operation or service it is the
user’s responsibility to unload unearthed parts.
3.2 Vibration Requirements and Earthquake Protection
This equipment does not produce vibrations. In case of vibration sensitivity, however,
it is suggested that the PA300 is set on a vibration isolation table in order that the
equipment is not disturbed by movement from outside i.e.: earthquakes or tremors.
3.3 Media Requirements
3.3.1 Vacuum
Less than 200 mbar absolute, flow rate insignificant. Vacuum inputs ¼” or 6mm. All
connections to house vacuum system should be separate to avoid vacuum interference.
System Input
U.S. installations are 1/4“ hose, international installations are 6 mm.
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
15
3.3.2 Compressed Air
Filtered, dry and oil free air of at least 0.4 MPa or 4 bar up to 1 MPa or 10 bar; flow rate
is insignificant.
System Input
U.S. installations are 1/4“ hose, international installations are 6 mm.
3.3.3 Power
U.S. Installations
The basic prober requires two grounded (3-pronged) 115 V / 60 Hz / 20 A outlets within
1.8 m of the location of the unit, depending on the set-up. A power distribution strip
with 6 sockets is supplied with the system.
International Installations
The system requires 230 V / 50 Hz a.c., 510 VA power. Optional accessories will
require additional outlets.
3.4 Communication Interface
1 Serial interface
YES / NO This equipment complies with SEMI E4 (SEMI Equipment
Communications Standard 1 Message Transfer (SECS I))
YES / NO This equipment complies with SEMI E37 and E37.1, High-Speed SECS
Message Services, Single Session (HSMS-SS)
YES / NO Network
YES / NO Other
YES / NO This equipment complies with SEMI E5 (SEMI Equipment
Communications Standard Message 2 Content (SECS II)).
YES / NO Message sequences conform to the recommendations of SEMI E30
The following capabilities scenarios are implemented on this equipment:
YES / NO establish communications
YES / NO data collection
YES / NO alarm management
YES / NO remote control
YES / NO process program management
YES / NO material movement
YES / NO equipment terminal services
YES / NO error messages
YES / NO clock
YES / NO spooling
YES / NO log file
YES / NO additional
16
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
3.5 Shipping and Receiving Requirements
3.5.1 Equipment Data Information
Environmental Requirements Operate Standby
Ambient Temperature (°C) 5 - 40 N/A
Ambient Humidity (%r.H.) 40 - 60 N/A
Pollution Degree
Grade 1 as per 1 IEC 664 N/A
Clean Room Class Class 6 as per DIN EN ISO 14664-1 N/A
3.5.2 Packaging
Length
(mm)
Width
(mm)
Height
(mm)
Net
Weight
(kg)
Gross
Weight
(kg)
System box
1230 1200 1120 498 607
Table with palette 1050 1000 850 97 102
Accessories 800 1200 800 - approx. 80