SussPA300UserGuide - 第18页
SUSS / PA300 / User Manual / M10-121841-00 / February 2002 17 4 Main Components of the System 4.1 Typical System Data Set screw Levelling screw * the gap will be 2 mm if your system is equipped for HF or doubleside measu…
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
3.5 Shipping and Receiving Requirements
3.5.1 Equipment Data Information
Environmental Requirements Operate Standby
Ambient Temperature (°C) 5 - 40 N/A
Ambient Humidity (%r.H.) 40 - 60 N/A
Pollution Degree
Grade 1 as per 1 IEC 664 N/A
Clean Room Class Class 6 as per DIN EN ISO 14664-1 N/A
3.5.2 Packaging
Length
(mm)
Width
(mm)
Height
(mm)
Net
Weight
(kg)
Gross
Weight
(kg)
System box
1230 1200 1120 498 607
Table with palette 1050 1000 850 97 102
Accessories 800 1200 800 - approx. 80
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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4 Main Components of the System
4.1 Typical System Data
Set screw
Levelling screw
* the gap will be 2 mm if your system is equipped for HF or doubleside measurements or with a thermo chuck
Platen
Chuck
1 mm gap*
optional
measuring
units
Pa300 with table
Monitor
Electronics
Keyboard,
mouse &
panel
Front view
Top view Pa300
200
600* 600*
800
*For installation only
Cable
connection
location
Table: W x D x H
= 800 x 800 x 750 mm
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
4.2 The Basic Prober
4.2.1 System Dimensions
System height is with microscope in raised position.
System depth is with microscope in full rearward position.
For laser cutter add 305 mm to the height.
For camera add camera height, plus 64 mm for camera adapter to the height.
The table and the device stand on 4 positional points in the four corners, each carrying
200kg. The centre of gravity falls nearly in the centre, moving about +100 mm in both
the X and Y directions.
950
1107
705
900
Z travel 80 (130)
0
100
518
598
1434
43
360
6
0
°