SussPA300UserGuide - 第25页
24 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 5 Material Requirements 5.1 Wafer Handling YES / NO Wafers are inserted manually, one at a time, into this equipment YES / NO This equipment is provided with …
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
23
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24
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
5 Material Requirements
5.1 Wafer Handling
YES / NO Wafers are inserted manually, one at a time, into this equipment
YES / NO This equipment is provided with a single-wafer transport mechanism
and port in compliance with SEMI E8 (Specification for Wafer Transport
Systems: Interface Co-ordinates)
YES / NO Wafers are inserted into this equipment in wafer carriers (cassettes)
Please note that automated wafer handling is optional. The specifications are not,
however, included in this manual.
5.2 Wafer Carriers
This equipment is does not accept wafers delivered in SEMI standard carriers
(cassettes).
5.3 Wafer Alignment
Wafer flat/notch alignment is not required.
5.4 Loading a Substrate or Wafer
1. Press the load button on the Joystick Controller. The chuck will move to its most
forward and lowest position. (Please refer to the ProberBench
®
Manual for how
to set this position).
2. Open the loading lid taking safety precautions into consideration.
3. Place the substrate or wafer onto the chuck. Press the vacuum button on the
Joystick controller and the LED should light up.
4. Close the loading lid and press the GoHome button.
5. Proceed with the alignment procedure (see section 7.3.1).
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
25
6 Installation
Installation i.e. unpacking, assembly and set up can only be undertaken by SUSS
personnel or by SUSS qualified service people. Prerequisites for handling the system
must be laid down by the customer. Support from the customer whilst setting up is
possible and desirable. Any further work such as upgrading, adding supplementary
accessories etc. should only be undertaken after checking with the manufacturer.
Please note the warranty conditions. Please use only original SUSS spare parts.
Every step from receiving to final hook-up should be considered.
6.1 Shipping and Receiving Requirements
A door width of 1m (1.5m with a dark box - SE1200) should be available.
A fork lift with a 600kg load capability should also be available.
Please refer to the Facility Preparation Sheet for more details.
6.1.1 Equipment Data
Physical
Properties
Installed Clearance (mm)
Height (mm) 814 Front 1220
Depth (mm) 950 Back 1220
Width (mm) 950 Left 1220
Weight (kg) 600 Right 1220
Number of pieces min. 2 Top 2500
Environmental Requirements Operate Standby
Ambient Temperature (°C) 5 - 40 N/A
Ambient Humidity (%r.H.) 40 - 60 N/A
Pollution Degree
Grade 1 as per 1 IEC 664 N/A
Clean Room Class Class 6 as per DIN EN ISO 14664-1 N/A