SussPA300UserGuide - 第26页

SUSS / PA300 / User Manual / M10-121841-00 / February 2002 25 6 Installation Installation i.e. unpacking, assembly and set up can only be undertaken by SUSS personnel or by SUSS qualified service people. Prerequisites fo…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

5 Material Requirements

5.1 Wafer Handling

YES / NO Wafers are inserted manually, one at a time, into this equipment

YES / NO This equipment is provided with a single-wafer transport mechanism

and port in compliance with SEMI E8 (Specification for Wafer Transport

Systems: Interface Co-ordinates)

YES / NO Wafers are inserted into this equipment in wafer carriers (cassettes)

Please note that automated wafer handling is optional. The specifications are not,

however, included in this manual.

5.2 Wafer Carriers

This equipment is does not accept wafers delivered in SEMI standard carriers

(cassettes).

5.3 Wafer Alignment

Wafer flat/notch alignment is not required.

5.4 Loading a Substrate or Wafer

1. Press the load button on the Joystick Controller. The chuck will move to its most

forward and lowest position. (Please refer to the ProberBench

Manual for how

to set this position).

2. Open the loading lid taking safety precautions into consideration.

3. Place the substrate or wafer onto the chuck. Press the vacuum button on the

Joystick controller and the LED should light up.

4. Close the loading lid and press the GoHome button.

5. Proceed with the alignment procedure (see section 7.3.1).

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

6 Installation

Installation i.e. unpacking, assembly and set up can only be undertaken by SUSS

personnel or by SUSS qualified service people. Prerequisites for handling the system

must be laid down by the customer. Support from the customer whilst setting up is

possible and desirable. Any further work such as upgrading, adding supplementary

accessories etc. should only be undertaken after checking with the manufacturer.

Please note the warranty conditions. Please use only original SUSS spare parts.

Every step from receiving to final hook-up should be considered.

6.1 Shipping and Receiving Requirements

A door width of 1m (1.5m with a dark box - SE1200) should be available.

A fork lift with a 600kg load capability should also be available.

Please refer to the Facility Preparation Sheet for more details.

6.1.1 Equipment Data

Physical

Properties

Installed Clearance (mm)

Height (mm) 814 Front 1220

Depth (mm) 950 Back 1220

Width (mm) 950 Left 1220

Weight (kg) 600 Right 1220

Number of pieces min. 2 Top 2500

Environmental Requirements Operate Standby

Ambient Temperature (°C) 5 - 40 N/A

Ambient Humidity (%r.H.) 40 - 60 N/A

Pollution Degree

Grade 1 as per 1 IEC 664 N/A

Clean Room Class Class 6 as per DIN EN ISO 14664-1 N/A

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

6.1.2 Packaging

The complete PA300 will be delivered in 3 boxes:

Length

(mm)

Width

(mm)

Height

(mm)

Net

Weight

(kg)

Gross

Weight

(kg)

System box

1230 1200 1120 498 607

Table with palette 1050 1000 850 97 102

Accessories 800 1200 800 - approx. 80

The weight of the accessories box is dependent on what has been ordered and will

change accordingly.

It should be noted that all packaging materials are recyclable so it is possible to re-use

them or return them to the supplier.

6.2 Unpacking

The probe system is typically shipped in a crate containing the prober mechanics and

one or more cartons containing the electronics, computer, monitor and accessories.

The prober mechanic is secured on the pallet at four points with the aid of a transportation

frame. After removing the brackets mount the transport rings and ropes, and use a

stabile fork lift (600 kg load min.) to move the mechanics.

Note: To avoid damaging the prober, use the transport frame provided to

move the prober; do not lift the system by the platen or the micro

scope bridge.

Unpack the remaining components.

Delicate components, such as microscope objectives and probeheads, should remain

in individual boxes until ready to install on the prober.

Note: After installing the prober, save all transport locks, handles, screws,

etc. for use in the event that the system must be moved. The return of

a not secured system invalidates all claims on the guarantee.

Before beginning the installation, place the system in its final location unless the limited

accessibility of a light-tight enclosure or clean room prevents assembly there.